IP Library › Granted Patent US 8,994,270
Granted Patent B2
US 8,994,270 · App. 12/924,404 · Granted Mar 31, 2015

System and methods for plasma application

Inventors: Il-Gyo Koo (Fort Collins, CO); Cameron A. Moore (Loveland, CO); George J. Collins (Fort Collins, CO); Jin-Hoon Cho (Fort Collins, CO)
Assignee: Colorado State University Research Foundation
H05H1/24H01J37/32366H01J37/3244H01J37/32449H05H2245/122
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Quick Facts
Patent No.
US 8,994,270
App. No.
12/924,404
Granted
Mar 31, 2015
Kind
B2
Abstract

The present disclosure provides for a plasma system. The plasma system includes a plasma device, an ionizable media source, and a power source. The plasma device includes an inner electrode and an outer electrode coaxially disposed around the inner electrode. The inner electrode includes a distal portion and an insulative layer that covers at least a portion of the inner electrode. The ionizable media source is coupled to the plasma device and is configured to supply ionizable media thereto. The power source is coupled to the inner and outer electrodes, and is configured to ignite the ionizable media at the plasma device to form a plasma effluent having an electron sheath layer about the exposed distal portion.

Claims (32)

1. A plasma system, comprising:

a plasma device including an inner electrode and an outer electrode coaxially disposed around the inner electrode, wherein the inner electrode includes an end distal portion extending distally past a distal end of the outer electrode and an insulative layer that extends up to the distal end of the outer electrode and covers the inner electrode at least up to the end distal portion of the inner electrode such that the end distal portion of the inner electrode is un-insulated;

an ionizable media source coupled to the plasma device and configured to supply ionizable media thereto; and

a power source coupled to the inner and outer electrodes and configured to ignite the ionizable media at the plasma device to form a plasma effluent having an electron sheath layer about the end distal portion of the inner electrode.

2. A plasma system according to claim 1 , wherein the insulative layer is configured to limit the plasma effluent to the end distal portion and to provide a source of secondarily-emitted electrons that form at least a part of the electron sheath layer.

3. A plasma system according to claim 2 , wherein the insulative layer is formed from a material having a secondary electron emission yield from about 1 to about 10.

4. A plasma system according to claim 1 , wherein the inner electrode is formed from a conductive metal and the insulative layer is a metallic oxide of the conductive metal.

5. A plasma system according to claim 1 , wherein the plasma device further includes an electrode spacer disposed between the inner and outer electrodes.

6. A plasma system according to claim 5 , wherein the electrode spacer includes a central opening defined therein and adapted for insertion of the inner electrode therethrough.

7. A plasma system according to claim 6 , wherein the electrode spacer includes at least one flow opening defined therein and configured to receive the flow of the ionizable media, the at least one flow opening being disposed radially around the central opening.

8. A plasma device configured to receive ionizable media, comprising:

an outer electrode having a substantially cylindrical tubular shape; and

an inner electrode coaxially disposed within the outer electrode, the inner electrode including an end distal portion extending distally past a distal end of the outer electrode and an insulative layer that extends up to the distal end of the outer electrode and covers the inner electrode at least up to the end distal portion of the inner electrode such that the end distal portion of the inner electrode is un-insulated,

the insulative layer configured to limit plasma effluent to the end distal portion and to provide a source of secondarily-emitted electrons to form an electron sheath layer about the inner electrode end distal portion.

9. A plasma device according to claim 8 , wherein the insulative layer is formed from a material having a secondary electron emission yield from about 1 to about 10.

10. A plasma device according to claim 8 , wherein the inner electrode is formed from a conductive metal and the insulative layer is a metallic oxide of the conductive metal.

11. A plasma device according to claim 8 , wherein the plasma device further includes an electrode spacer disposed between the inner and outer electrodes.

12. A plasma device according to claim 11 , wherein the electrode spacer includes a central opening defined therein and adapted for insertion of the inner electrode therethrough.

13. A plasma device according to claim 12 , wherein the electrode spacer includes at least one flow opening defined therein and configured to receive the flow of the ionizable media, the at least one flow opening being disposed radially around the central opening.

14. A plasma system, comprising:

an outer electrode having a substantially cylindrical tubular shape; and

an inner electrode coaxially disposed within the outer electrode, the inner electrode includes an end distal portion extending distally past a distal end of the outer electrode and an insulative layer that extends up to the distal end of the outer electrode and covers the inner electrode at least up to the end distal portion of the inner electrode such that the end distal portion of the inner electrode is un-insulated, the insulative layer configured to limit plasma effluent to the end distal portion and to provide a source of secondarily-emitted electrons;

an ionizable media source coupled to the plasma device and configured to supply ionizable media thereto; and

a power source coupled to the inner and outer electrodes and configured to ignite the ionizable media at the plasma device to form a plasma effluent having an electron sheath layer of a predetermined thickness formed from the secondarily-emitted electrons, the electron sheath layer being formed about the end distal portion of the inner electrode.

15. A plasma system according to claim 14 , wherein the insulative layer is formed from a material having a secondary electron emission yield from about 1 to about 10.

16. A plasma system according to claim 14 , wherein the inner electrode is formed from a conductive metal and the insulative layer is a metallic oxide of the conductive metal.

17. A plasma system according to claim 14 , wherein the plasma device further includes an electrode spacer disposed between the inner and outer electrodes.

18. A plasma system according to claim 17 , wherein the electrode spacer includes a central opening defined therein and adapted for insertion of the inner electrode therethrough.

19. A plasma system according to claim 18 , wherein the electrode spacer includes at least one flow opening defined therein and configured for the flow of the ionizable media, the at least one flow opening being disposed radially around the central opening.

20. A plasma system according to claim 14 , wherein the predetermined thickness of the electron sheath layer is adjusted by selecting a specific ionizable media having a predetermined media density and an average particle cross-section.

21. A plasma system according to claim 20 , wherein the predetermined thickness of the electron sheath layer is inversely proportional to the media density of the ionizable media and the average particle cross-section.

22. The plasma system according to claim 1 , wherein the end distal portion of the inner electrode is disposed in its entirety outside of the outer electrode.

Assignments (1)
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Dec 20, 2010
From: KOO, IL-GYO; MOORE, CAMERON A.; COLLINS, GEORGE J.; CHO, JIN-HOON
To: COLORADO STATE UNIVERSITY RESEARCH FOUNDATION
Reel/Frame 025527/0265 →
Continuity (4)
Continuation In Part PCTUS2009045708 · May 29, 2009
Provisional Application 61277809 · Sep 30, 2009
Provisional Application 61057667 · May 30, 2008
Related Publication 20110101862A1 · May 5, 2011