Method for forming metal semiconductor alloys in contact holes and trenches
A method of forming a semiconductor device is provided that includes forming a first metal semiconductor alloy on a semiconductor containing surface, forming a dielectric layer over the first metal semiconductor alloy, forming an opening in the dielectric layer to provide an exposed surface the first metal semiconductor alloy, and forming a second metal semiconductor alloy on the exposed surface of the first metal semiconductor alloy. In another embodiment, the method includes forming a gate structure on a channel region of a semiconductor substrate, forming a dielectric layer over at least a source region and a drain region, forming an opening in the dielectric layer to provide an exposed surface the semiconductor substrate, forming a first metal semiconductor alloy on the exposed surface of the semiconductor substrate, and forming a second metal semiconductor alloy on the first metal semiconductor alloy.
1. A method of forming a semiconductor device comprising:
forming a first metal semiconductor alloy on a semiconductor containing surface;
forming a dielectric layer over the first metal semiconductor alloy;
forming an opening in the dielectric layer to provide an exposed surface of the first metal semiconductor alloy, wherein the forming of the opening in the dielectric layer to provide the exposed surface of the first metal semiconductor alloy comprises etching, and said etching decreases a thickness of the first metal semiconductor alloy by 5% to 95% of an original thickness of the first metal semiconductor alloy; and
forming a second metal semiconductor alloy on the exposed surface of the first metal semiconductor alloy.
2. The method of claim 1 , wherein the forming of the first metal semiconductor alloy on the semiconductor containing surface comprises:
depositing a first metal layer on the semiconductor containing surface of a substrate that includes a source region and a drain region, wherein the source region and the drain region are on opposing sides of a gate structure; and
applying a first anneal to convert at least a first portion of the first metal layer and the semiconductor containing surface of the substrate into the first metal semiconductor alloy, wherein the first metal semiconductor alloy extends to a sidewall of the gate structure.
3. The method of claim 2 further comprising removing a remaining portion of the first metal layer that is not converted into the first metal semiconductor alloy.
4. The method of claim 2 , wherein the exposed portion of the first metal semiconductor alloy is laterally separated from the gate structure.
5. The method of claim 4 , wherein the forming of the second metal semiconductor alloy on the exposed surface of the first metal semiconductor alloy comprises:
depositing a second metal layer on the exposed surface of the first metal semiconductor alloy;
applying a second anneal to convert at least a portion of the second metal layer and the first metal semiconductor alloy into the second metal semiconductor alloy; and
removing a remaining portion of the second metal layer that is not converted into the second metal semiconductor alloy.
6. The method of claim 5 , wherein an upper surface of the second metal semiconductor alloy is vertically offset from an upper surface of the first metal semiconductor alloy.