Epitaxial formation of source and drain regions
Mechanisms for forming source/drain (S/D) regions of field effect transistors (FETs) are provided. The mechanisms eliminate dislocations near gate corners and gate corner defects (GCDs), and maintain transistor performance. The mechanisms described involve using a post-deposition etch to remove residual dislocations near gate corners after a cyclic deposition and etching (CDE) process is used to fill a portion of the recess regions with an epitaxially grown silicon-containing material. The mechanisms described also minimize the growth of dislocations near gate corners during the CDE process. The remaining recess regions may be filled by another silicon-containing layer deposited by an epitaxial process without forming dislocations near gate corners. The embodiments described enable gate corners to be free of dislocation defects, preserve the device performance from degradation, and widen the process window of forming S/D regions without gate corner defects and chamber matching issues.
1. A method of forming an integrated circuit, the method comprising:
forming a plurality of gate structures over a substrate;
removing portions of the substrate to form recesses adjacent to the plurality of gate structures;
depositing a first epitaxial silicon-containing layer in the recesses, wherein depositing the first epitaxial silicon-containing layer uses a cyclic deposition etching (CDE) process, and a top surface of the first epitaxial silicon-containing layer is entirely below a top surface of the substrate;
performing an etching process after depositing the first epitaxial silicon-containing layer to remove dislocations near gate corners, wherein an entirety of sidewalls of each recess of the recesses remains covered by the first epitaxial silicon-containing layer following the etching process; and
depositing a second epitaxial silicon-containing layer over the first epitaxial silicon-containing layer to form source and drain regions next to the plurality of gate structures, wherein a top surface of the second epitaxial silicon-containing layer is entirely above the top surface of the substrate.
2. The method of claim 1 , wherein the etching process after depositing the first epitaxial silicon-containing layer enables the source and drain regions formed to be free of dislocation defects near gate corners of the plurality of gate structures.
3. The method of claim 1 , wherein the etching process after depositing the first epitaxial silicon-containing layer broadens the process window to allow chamber to chamber matching for producing the first epitaxial silicon containing layer free of dislocation near gate corners.
4. The method of claim 1 , wherein the processing gases of the etching process after depositing the first epitaxial silicon-containing layer include HCl and GeH 4 .
5. The method of claim 1 , wherein the recesses have a depth in a range from about 200 Å to about 400 Å.
6. The method of claim 1 , wherein a thickness of the first epitaxial silicon-containing layer is in a range from about 70 Å to about 300 Å.
7. The method of claim 1 , wherein a thickness of the second epitaxial silicon-containing layer is in a range from about 30 Å to about 400 Å.
8. The method of claim 1 , wherein the CDE process includes a deposition, a purge after deposition, an etch, and a purge after etch in each deposition and etch cycle, and wherein the CDE process is performed in the same process chamber.
9. The method of claim 8 , wherein the deposition forms an epitaxial material in each of the recesses and an amorphous material on other parts of the substrate.
10. The method of claim 8 , wherein the etch in the CDE process removes a portion of silicon-containing material formed by the deposition.
11. The method of claim 1 , wherein the first epitaxial silicon-containing layer is doped with phosphorus and carbon, wherein the concentration of the carbon is in a range from about 0.3 atomic % to about 2 atomic %, and wherein the concentration of the phosphorus is in a range from about 0.3 atomic % to about 2 atomic %.
12. The method of claim 1 , wherein the second epitaxial silicon-containing layer is doped with phosphorus, wherein the concentration of the phosphorus is in a range from about 0.3 atomic % to about 2 atomic %.
13. The method of claim 1 , wherein the processing temperatures of depositing the first epitaxial silicon-containing layer and of depositing the second epitaxial silicon-containing layer are in a range from about 500° C. to about 750° C.
14. The method of claim 1 , wherein the first epitaxial silicon-containing layer and the second epitaxial silicon-containing layer are each doped with an N-type dopant, wherein the N-type dopant in each layer is doped in-situ with a dopant-containing carrier gas.
15. The method of claim 14 , wherein the activation level of the first epitaxial silicon-containing layer is in range from about 2E20 atoms/cm 3 to about 6E20 atoms/cm 3 .
16. A method of forming an integrated circuit, the method comprising:
forming a plurality of gate structures over a substrate;
removing portions of the substrate to form recesses adjacent to the plurality of gate structures;
depositing a first epitaxial silicon-containing layer in the recesses, wherein depositing the first epitaxial silicon-containing layer uses a cyclic deposition etching (CDE) process;
performing an etching process after depositing the first epitaxial silicon-containing layer to remove dislocations near gate corners; and
depositing a second epitaxial silicon-containing layer over the first epitaxial silicon-containing layer to form source and drain regions next to the plurality of gate structures, wherein a deposition rate of depositing the second epitaxial silicon-containing layer is different from a deposition rate of depositing the first epitaxial silicon-containing layer, and the etching process after depositing the first epitaxial silicon-containing layer enables the source and drain regions formed to be free of dislocation defects near gate corners of the plurality of gate structures.
17. A method of forming an integrated circuit, the integrated circuit comprising a first gate structure over a substrate, the method comprising:
forming recesses in the substrate adjacent to the first gate structure;
depositing a first epitaxial silicon-containing layer in the recesses using a cyclic deposition etching (CDE) process, wherein the CDE process comprises:
depositing a silicon-containing material having a first thickness,
removing a second thickness of the silicon-containing material, and
repeating the depositing the silicon-containing material and the removing the second thickness of the silicon-containing material until an overall thickness is achieved; and
depositing a second epitaxial silicon-containing layer over the first epitaxial silicon-containing layer to form source and drain regions next to the first gate structure, wherein the second epitaxial silicon-containing layer comprises a dislocation region containing at least one dislocation.
18. The method of claim 17 , wherein depositing the first epitaxial silicon-containing layer comprises performing the CDE process in-situ.
19. The method of claim 17 , wherein depositing the silicon-containing material comprises depositing the silicon-containing material to the first thickness ranging from about 15 Angstrom (Å) to about 80 Å.
20. The method of claim 17 , wherein removing the second thickness of the silicon-containing material comprises removing the first thickness ranging from about 5 Å to about 30 Å.