Information processing apparatus, information processing method, and memory medium
An information processing apparatus for processing information generated by an exposure apparatus which exposes a substrate to radiant energy, comprises an information collecting unit configured to collect first apparatus information obtained by the exposure apparatus via an operation thereof with respect to each of a plurality of first regions which form a first array defined on the substrate, a converting unit configured to convert at least a part of the first apparatus information collected with respect to each of the plurality of first regions by the information collecting unit into second apparatus information with respect to each of a plurality of second regions which form a second array, a statistical processing unit configured to statistically process the second apparatus information, and an analyzing unit configured to analyze the statistical processing result obtained by the statistical processing unit.
1. An information processing apparatus for processing information generated by an exposure apparatus which exposes a substrate to radiant energy with respect to each of a plurality of shot regions on the substrate, at least one device being to be manufactured from each of the plurality of shot regions, the information processing apparatus comprising:
a collecting unit configured to collect, from the exposure apparatus, first information obtained by the exposure apparatus with respect to each of a plurality of first regions which form a first array defined on the substrate via an exposure of each of the plurality of shot regions, each of the first regions being equal to or smaller than a corresponding one of the shot regions, and each of the shot regions including at least one of the first regions;
a converting unit configured to convert at least a part of the collected first information into second information defined with respect to each of a plurality of second regions which form a standard array for use in evaluation of the exposure apparatus or the substrate, each of the first regions corresponding to at least one of the second regions;
a statistical processing unit configured to statistically process the second information, the second information having been obtained with respect to information generated by the exposure apparatus with respect to a plurality of kinds of the first array, the plurality of kinds being different from each other in at least one of a dimension and position of each of the plurality of first regions on the substrate; and
an analyzing unit configured to analyze the statistically processed information to obtain information about the evaluation of the exposure apparatus or the substrate.
2. The apparatus according to claim 1 , wherein the analyzing unit is configured to calculate, with respect to each of the plurality of second regions, a difference between the statistically processed information obtained with respect to different periods to output the calculated difference.
3. The apparatus according to claim 1 , wherein the analyzing unit is configured to output, in comparable forms, information on the statistically processed information obtained with respect to different periods.
4. The apparatus according to claim 1 , wherein the analyzing unit is configured to calculate, with respect to each of the plurality of second regions, a difference between the statistically processed information obtained with respect to different periods, to output information on the calculated difference.
5. The apparatus according to claim 1 , wherein
the analyzing unit configured to set, as reference information, the statistically processed information obtained with respect to a first period, to set, as determination target information, the statistically processed information obtained with respect to a second period, to calculate a difference between the reference information and the determination target information with respect to each of the plurality of second regions, to output the calculated difference, and
the first period is longer than the second period.
6. The apparatus according to claim 1 , wherein
the analyzing unit is configured to set, as reference information, the statistically processed information obtained with respect to a first period, to set, as determination target information, the statistically processed information obtained with respect to a second period, and to output, in comparable forms, information on the reference information and the determination target information, and
the first period is longer than the second period.
7. The apparatus according to claim 1 , wherein
the analyzing unit is configured to set, as reference information, the statistically processed information obtained with respect to a first period, to set, as determination target information, the statistically processed information obtained with respect to a second period, to calculate a difference between the reference information and the determination target information with respect to each of the plurality of second regions, to output information on the calculated difference, and
the first period is longer than the second period.
8. The apparatus according to claim 5 , wherein the analyzing unit is configured to output information on a time-series change in the reference information.
9. The apparatus according to claim 6 , wherein the analyzing unit is configured to output information on a time-series change in the reference information.
10. The apparatus according to claim 7 , wherein the analyzing unit is configured to output information on a time-series change in the reference information.