Flexible waveguides for optical coherence tomography
A system and method for depth-resolved imaging of a sample are presented. The system for depth-resolved imaging of a sample includes a substrate of substantially flexible material, a plurality of waveguides disposed on the substrate, an optical element disposed at a distal end of the plurality of waveguides, and one or more interferometers. Light is collected from the sample through the optical element and plurality of waveguides on the flexible substrate on its path to the one or more interferometers. The interferometers are configured to combine a reference light with the light received by at least a portion of the plurality of waveguides to resolve contributions from one or more depths of the sample. The system further includes a light guiding element coupled between the plurality of waveguides and the one or more interferometers.
1. A method of making an optical coherence tomography system, comprising:
bonding a layer of semiconducting material to a layer of flexible material;
thinning the layer of semiconducting material to a thickness less than 10 microns;
patterning the layer of semiconducting material to form a plurality of waveguides bonded to the layer of flexible material;
bending the layer of flexible material having the plurality of waveguides bonded thereto; and
coupling the plurality of waveguides on the bent flexible material to one or more interferometers used to perform optical coherence tomography.
2. A method of making an optical coherence tomography system, comprising:
patterning a layer of semiconducting material in a device layer of a SOI wafer to form a plurality of waveguides, wherein the SOI wafer includes:
the device layer,
a buried oxide layer, and
a handle layer;
depositing a first layer of flexible material over the plurality of waveguides formed in the device layer;
etching the handle layer of the SOI wafer to substantially remove the handle layer;
etching the buried oxide layer of the SOI wafer to substantially remove the buried oxide layer;
depositing a second layer of flexible material over the plurality of waveguides such that the plurality of waveguides are sandwiched between the first and second layers of flexible material to form a flexible optical circuit;
bending the flexible optical circuit; and
coupling the plurality of waveguides on the bent flexible optical circuit to one or more interferometers used to perform optical coherence tomography.
3. The method of claim 1 , wherein the flexible material is a polymer.
4. The method of claim 3 , wherein the polymer is PDMS.
5. The method of claim 3 , wherein the polymer is parylene.
6. The method of claim 1 , wherein the semiconducting material comprises silicon, gallium arsenide, or indium phosphide.
7. The method of claim 1 , wherein the bending comprises rolling the layer of flexible material into a substantially cylindrical shape.
8. The method of claim 1 , wherein the bending comprises rolling the layer of flexible material into itself to form a spiral pattern.
9. The method of claim 1 , wherein the thinning comprises thinning the layer of semiconducting material to a thickness less than 1 micron.
10. The method of claim 2 , wherein the first and second layers of flexible material include a polymer.
11. The method of claim 10 , wherein the polymer is PDMS.
12. The method of claim 10 , wherein the polymer is parylene.
13. The method of claim 2 , wherein the bending comprises rolling the flexible optical circuit into a substantially cylindrical shape.
14. The method of claim 2 , wherein the bending comprises rolling the flexible optical circuit into itself to form a spiral pattern.
15. The method of claim 2 , wherein the device layer has a thickness of less than 10 microns.