IP Library Granted Patent US 9,064,920
Granted Patent B2
US 9,064,920 · App. 13/555,168 · Granted Jun 23, 2015

Electrostatic charge removal for solar cell grippers

Inventors: Jason Schaller (Austin, TX); Robert Brent Vopat (Austin, TX)
Assignee: Varian Semiconductor Equipment Associates, Inc.
H01L21/67742B65G2812/16B65G49/06B65G2207/10B25J15/0616H05F3/02H01L21/67766H01L21/67781
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Quick Facts
Patent No.
US 9,064,920
App. No.
13/555,168
Granted
Jun 23, 2015
Kind
B2
Abstract

A manufacturing system includes a gantry module, having an end effector, for moving workpieces from a conveyor system to a working area, such as a swap module. The swap module removes a matrix of processed workpieces from a load lock and place a matrix of unprocessed workpieces in its place. The processed workpieces are then moved by the gantry module back to the conveyor. Due to the speed of operation, the end effector may build up excessive electrostatic charge. To remove this built up charge, grounded electrically-conductive brushes are strategically positioned so that, as the end effector moves during normal operation, it comes in contact with these brushes. This removes this built up charge on the end effector, without affecting throughput. In another embodiment, the end effector moves over the brushes while the swap module is moving matrix to and from the load lock.

Claims (10)

1. A method of removing electrostatic charge from an end effector of a workpiece handling system, comprising:

using said end effector to pick up a workpiece from a source;

moving said end effector with said workpiece to a location;

placing said workpiece at said location;

returning to said source to retrieve a second workpiece; and

contacting brushes that are grounded and electrically-conductive with said end effector while moving to said source and when said end effector is not carrying a workpiece,

wherein the brushes are always tied to earth ground.

2. The method of claim 1 , wherein said end effector travels at a first vertical height while moving to said location, and a second vertical height, less than said first vertical height, while returning to said source.

3. The method of claim 1 , wherein said location is a destination.

4. The method of claim 1 , wherein said location is a working area, and said method further comprises moving workpieces from said working area to a destination prior to returning to said source to retrieve a second workpiece.

Assignments (1)
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Aug 27, 2012
From: SCHALLER, JASON; VOPAT, ROBERT BRENT
To: VARIAN SEMICONDUCTOR EQUIPMENT ASSOCIATES, INC.
Reel/Frame 028854/0799 →
Continuity (1)
Related Publication 20140023461A1 · Jan 23, 2014