Light-emitting display backplane, display device and manufacturing method of pixel define layer
The present invention discloses a light-emitting display backplane, a display device and a manufacturing method of a pixel define layer. A light-emitting display backplane according to the present invention comprises: a substrate and a pixel define layer provided thereon, wherein said pixel define layer comprises: a first photosensitive resin layer, a first transparent define layer and a second transparent define layer sequentially provided on said substrate from bottom to top, each of the first photosensitive resin layer, the first define layer and the second define layer is provided with openings corresponding to respective pixels, and the openings in said second define layer are smaller than those in both said first define layer and said first photosensitive resin layer, so as to form luminescent material filling regions which are wider at bottom and narrower at top.
1. A manufacturing method of a pixel define layer of a light-emitting display backplane, wherein, said light-emitting display backplane, comprises a substrate and a pixel define layer provided on said substrate, and said method comprises:
step 1: sequentially forming a first photosensitive resin layer, a first transparent define layer, a second transparent define layer and a second photosensitive resin layer on said substrate;
step 2: providing a mask above said second photosensitive resin layer, wherein said mask has a pattern corresponding to respective pixels
step 3: performing exposure, so that both said second photosensitive resin layer and said first photosensitive resin layer below said second photosensitive resin layer are exposed;
step 4: removing resin from regions in said second photosensitive resin layer which correspond to respective pixels, so as to uncover the second define layer;
step 5: performing etching, so as to form openings corresponding to respective pixels, in both the uncovered second define layer and said first define layer below the second define layer, wherein, during etching, etch rate at which said second define layer is etched is smaller than etch rate at which said first define layer is etched, so that the openings in said second define layer are smaller than those in said first define layer.
2. The method according to claim 1 , further comprising: removing resin from regions of the first photosensitive resin layer that correspond to respective pixels.
3. The method according to claim 1 , wherein, said second define layer is formed of a hydrophobic material.
4. The method according to claim 3 , wherein, said second define layer is silicon nitride thin film.
5. The method according to claim 4 , wherein, said first define layer is formed of a hydrophilic material.
6. The method according to claim 5 , wherein, said first define layer is a silicon oxide thin film.
7. The method according to claim 6 , wherein, In the step 5, etching on the uncovered second define layer and the first define layer is performed by means of dry etching.
8. The method according to claim 6 , wherein, in the step 5, etching on the uncovered second define layer and the first define layer is performed by means of wet etching, and etch rate of an applied etchant for the silicon nitride thin film is smaller than that for the silicon oxide thin film.