Light-emitting device and method for manufacturing the same
A highly reliable light-emitting device and a manufacturing method thereof are provided. A light-emitting element and a terminal electrode are formed over an element formation substrate; a first substrate having an opening is formed over the light-emitting element and the terminal electrode with a bonding layer provided therebetween; an embedded layer is formed in the opening; a transfer substrate is formed over the first substrate and the embedded layer; the element formation substrate is separated; a second substrate is formed under the light-emitting element and the terminal electrode; and the transfer substrate and the embedded layer are removed. In addition, an anisotropic conductive connection layer is formed in the opening, and an electrode is formed over the anisotropic conductive connection layer. The terminal electrode and the electrode are electrically connected to each other through the anisotropic conductive connection layer.
1. A method for manufacturing a light-emitting device, comprising the steps of:
forming a light-emitting element and a terminal electrode over an element formation substrate with a separation layer interposed therebetween, the light-emitting element comprising a first electrode, an EL layer , and a second electrode;
forming a first layer comprising an organic material over the terminal electrode;
forming a second layer comprising a metal material over the first layer;
forming a first substrate having a first portion over the light-emitting element, the terminal electrode, the first layer, and the second layer so that the first portion overlaps the terminal electrode, the first layer, and the second layer, wherein the first portion is in contact with grooves;
separating the element formation substrate from the light-emitting element and the terminal electrode;
forming a second substrate under the light-emitting element and the terminal electrode; and
separating the first portion from the first substrate by using the grooves.
2. The method for manufacturing a light-emitting device, according to claim 1 , wherein each of the first substrate and the second substrate is a flexible substrate.
3. The method for manufacturing a light-emitting device, according to claim 1 , wherein the organic material is a material contained in the EL layer.
4. The method for manufacturing a light-emitting device, according to claim 1 , wherein the second electrode and the second layer are formed simultaneously.
5. The method for manufacturing a light-emitting device, according to claim 1 , wherein the first portion is surrounded by the grooves.
6. The method for manufacturing a light-emitting device, according to claim 1 , wherein the first portion is capable of being removed by an adhesive tape.
7. A method for manufacturing a light-emitting device, comprising the steps of:
forming a light-emitting element and a terminal electrode over an element formation substrate with a separation layer interposed therebetween, the light-emitting element comprising a first electrode, an EL layer, and a second electrode;
forming a first layer comprising an organic material over the terminal electrode;
forming a second layer comprising a metal material over the first layer;
forming a first substrate having a first portion over the light-emitting element, the terminal electrode, the first layer, and the second layer so that the first portion overlaps the terminal electrode, the first layer, and the second layer, wherein the first portion is in contact with grooves; and
separating the first portion from the first substrate by using the grooves.
8. The method for manufacturing a light-emitting device, according to claim 7 , wherein the first substrate is a flexible substrate.
9. The method for manufacturing a light-emitting device, according to claim 7 , wherein the organic material is a material contained in the EL layer.
10. The method for manufacturing a light-emitting device, according to claim 7 , wherein the second electrode and the second layer are formed simultaneously.
11. The method for manufacturing a light-emitting device, according to claim 7 , wherein the first portion is surrounded by the grooves.
12. The method for manufacturing a light-emitting device, according to claim 7 , wherein the first portion is capable of being removed by an adhesive tape.
13. A method for manufacturing a light-emitting device comprising a terminal electrode and a light-emitting element comprising a first electrode, an EL layer, and a second electrode, comprising the steps of:
forming a first layer comprising an organic material over the terminal electrode;
forming a second layer comprising a metal material over the first layer;
forming a first substrate having a first portion over the light-emitting element, the terminal electrode, the first layer, and the second layer so that the first portion overlaps the terminal electrode, the first layer, and the second layer, wherein the first portion is in contact with grooves; and
separating the first portion from the first substrate by using the grooves.
14. The method for manufacturing a light-emitting device, according to claim 13 , wherein the first substrate is a flexible substrate.
15. The method for manufacturing a light-emitting device, according to claim 13 , wherein the organic material is a material contained in the EL layer.
16. The method for manufacturing a light-emitting device, according to claim 13 , wherein the second electrode and the second layer are formed simultaneously.
17. The method for manufacturing a light-emitting device, according to claim 13 , wherein the first portion is surrounded by the grooves.
18. The method for manufacturing a light-emitting device, according to claim 13 , wherein the first portion is capable of being removed by an adhesive tape.