Pressure sensor, oscillator, ultrasonic wave sensor and measuring method thereof
The present invention relates to a pressure sensor, which may include a first electrode plate, a second electrode plate, a third electrode plate, a fourth electrode plate and a fifth electrode plate, which are successively laminated on a substrate, wherein the first electrode plate, the third electrode plate and the fourth electrode plate are fixed to the substrate, the first electrode plate and the second electrode plate are disposed opposite to each other and have a gap formed therebetween, the second electrode plate is suspended over the first electrode plate to constitute a first capacitor; the second electrode plate and the third electrode plate are disposed opposite to each other and have a gap formed therebetween, to constitute a second capacitor; and the fifth electrode plate is suspended over the fourth electrode plate to constitute a third capacitor, and can move along a direction perpendicular to the substrate.
1. A pressure sensor, comprising:
a first electrode plate, a second electrode plate, a third electrode plate, a fourth electrode plate and a fifth electrode plate, which are successively laminated on a substrate comprising a control and reading circuit, wherein the first electrode plate, the third electrode plate and the fourth electrode plate are fixed to the substrate, the first electrode plate and the second electrode plate are disposed opposite to each other and have a gap formed therebetween, the second electrode plate is suspended over the first electrode plate to constitute a first capacitor; the second electrode plate and the third electrode plate are disposed opposite to each other and have a gap formed therebetween, which constitute a second capacitor; and the fourth electrode plate and the fifth electrode plate are disposed opposite to each other and have a gap formed therebetween, the fifth electrode plate is suspended over the fourth electrode plate to constitute a third capacitor, and the fifth electrode plate can move along a direction perpendicular to the substrate; and a first sealing ring, a second sealing ring and a third sealing ring, wherein the first sealing ring is disposed on the substrate, the second sealing ring is disposed around a periphery of the second electrode plate, an edge of the third electrode plate is lapped on the second sealing ring, and the third sealing ring is disposed between the fourth electrode plate and the fifth electrode plate and around a periphery of the fourth electrode plate, wherein the first electrode plate, the third electrode plate, the fourth electrode plate, the fifth electrode plate, the first sealing ring, the second sealing ring and the third sealing ring constitute a single continuous cavity, collectively.
2. The pressure sensor according to claim 1 , wherein when no external force is applied, the gap between the second electrode plate and the third electrode plate is narrower than that between the first electrode plate and the second electrode plate, and is narrower than that between the fourth electrode plate and the fifth electrode plate.
3. The pressure sensor according to claim 1 , wherein the second electrode plate and the fifth electrode plate are connected to each other through a contact plug or a contact bar which is perpendicular to the substrate.
4. The pressure sensor according to claim 3 , wherein a cross-sectional view of a combination of the second electrode plate, the fifth electrode plate and the contact plug or the contact bar is I-shaped.
5. The pressure sensor according to claim 1 , wherein the second sealing ring is formed in a same process for forming the second electrode plate, both of which comprise a same material and are disconnected with a gap therebetween.
6. The pressure sensor according to claim 1 , wherein a second insulation dielectric layer is formed on the fifth electrode plate, and a sixth electrode plate is formed on the second insulation dielectric layer.
7. A pressure sensor, comprising:
a second electrode plate, a third electrode plate, a fourth electrode plate and a fifth electrode plate, which are successively laminated on a substrate, wherein the second electrode plate and the third electrode plate are disposed opposite to each other and have a gap formed therebetween, which constitutes a first capacitor; and the fourth electrode plate and the fifth electrode plate are disposed opposite to each other and have a gap formed therebetween, which constitutes a second capacitor; the third electrode plate and the fourth electrode plate are fixed to the substrate, and the second electrode plate and the fifth electrode plate are connected fixedly and can move simultaneously along a direction perpendicular to the substrate; and a first sealing ring, a second sealing ring and a third sealing ring, wherein the first sealing ring is disposed on the substrate, the second sealing ring is disposed around a periphery of the second electrode plate, an edge of the third electrode plate is lapped on the second sealing ring, and the third sealing ring is disposed between the fourth electrode plate and the fifth electrode plate and around a periphery of the fourth electrode plate, wherein the third electrode plate, the fourth electrode plate, the fifth electrode plate, the first sealing ring, the second sealing ring and the third sealing ring constitute a single continuous cavity, collectively.
8. An oscillator, comprising:
a first electrode plate, a second electrode plate, a third electrode plate, a fourth electrode plate and a fifth electrode plate, which are successively laminated on a substrate, wherein the first electrode plate and the second electrode plate are disposed opposite to each other and have a gap formed therebetween, the second electrode plate is suspended over the first electrode plate to constitute a first capacitor; the second electrode plate and the third electrode plate are disposed opposite to each other and have a gap formed therebetween, which constitutes a second capacitor; the fourth electrode plate and the fifth electrode plate are disposed opposite to each other and have a gap formed therebetween, the fifth electrode plate is suspended over the fourth electrode plate to constitute a third capacitor; and the first electrode plate, the third electrode plate and the fourth electrode plate are fixed to the substrate, and the second electrode plate and the fifth electrode plate are connected fixedly, and can move simultaneously along a direction perpendicular to the substrate; wherein when applying an alternating voltage to the second electrode plate and the third electrode plate, the second electrode plate can oscillate; and a first sealing ring, a second sealing ring and a third sealing ring, wherein the first sealing ring is disposed on the substrate, the second sealing ring is disposed around a periphery of the second electrode plate, an edge of the third electrode plate is lapped on the second sealing ring, and the third sealing ring is disposed between the fourth electrode plate and the fifth electrode plate and around a periphery of the fourth electrode plate, wherein the first electrode plate, the third electrode plate, the fourth electrode plate, the fifth electrode plate, the first sealing ring, the second sealing ring and the third sealing ring constitute a single continuous cavity, collectively.
9. The oscillator according to claim 8 , wherein the gap between the second electrode plate and the third electrode plate is narrower than that between the first electrode plate and the second electrode plate, and is narrower than that between the fourth electrode plate and the fifth electrode plate.