Phase change memory and method of fabricating the phase change memory
Provided is a phase change memory, including: at least one wiring layer each including a first conductive layer and a phase change layer horizontally disposed on the first conductive layer; a heater layer disposed to vertically contact with the at least one wiring layer; and a second conductive layer disposed to contact with the heater layer in parallel therewith, and through which current flows from at least one electrode into the at least one wiring layer. The phase change layer may be made of a phase change material and may have a thickness less than a thickness of the first conductive layer.
1. A phase change memory, comprising:
at least one wiring layer each comprising a first conductive layer and a phase change layer horizontally disposed on the first conductive layer;
a heater layer disposed to vertically contact with the at least one wiring layer;
a second conductive layer disposed to contact with the heater layer in parallel therewith, and through which current flows from at least one electrode into the at least one wiring layer;
an insulator formed in a space formed by etching a portion of the first conductive layer;
at least one lower electrode connected to the at least one wiring layer; and
an upper electrode connected to the second conductive layer,
wherein the phase change layer is made of a phase change material and has a thickness less than a thickness of the first conductive layer.
2. The phase change memory of claim 1 , wherein the phase change layer is horizontally disposed on the first conductive layer using an atomic layer deposition (ALD) method.
3. The phase change memory of claim 1 , wherein the phase change layer has a phase change in a portion vertically contacting with the heater layer.
4. A method of fabricating a phase change memory, the method comprising:
forming at least one wiring layer by horizontally disposing a phase change layer on a first conductive layer;
forming a heater layer to vertically contact with the at least one wiring layer;
forming a second conducive layer to contact with the heater layer in parallel therewith, and through which current flows from at least one electrode into the at least one wiring layer:
forming at least one insulating layer between the at least one wiring layer;
forming an insulator in a space formed by etching a portion of the first conductive layer;
forming at least one lower electrode connected to the at least one wiring layer; and
forming an upper electrode connected to the second conductive layer,
wherein the phase change layer is made of a phase change material and has a thickness less than a thickness of the first conductive layer.
5. The method of claim 4 , wherein the forming of the at least one wiring layer comprises horizontally disposing the phase change layer on the first conductive layer using an atomic layer deposition (ALD) method.