Electrostatic membrane diffusion bonding structure and process
A method and structure for a printhead including a plurality of electrostatic actuators may include the formation of a first conductive layer, a first dielectric layer over the first conductive layer, and a second dielectric layer over the first dielectric layer. The first and second dielectric layers may be patterned to expose the first conductive layer, then sidewalls of the first dielectric layer may be isotropically etched to recess the sidewalls under the second dielectric layer. A self-patterned second conductive layer may be formed to include a first portion that forms at least a portion of an actuator electrode and physically and electrically contacts the first conductive layer, and a second portion that physically contacts the second dielectric layer. An actuator membrane may be diffusion bonded to the second dielectric layer using the second portion of the second conductive layer.
1. A printhead comprising a plurality of electrostatic actuators, wherein each electrostatic actuator comprises:
a patterned first conductive layer overlying a semiconductor substrate assembly and comprising a first portion;
a patterned second conductive layer having a first portion physically and electrically contacting the first portion of the patterned first conductive layer, wherein the first portion of the patterned second conductive layer is at least part of an actuator electrode;
a first dielectric layer overlying the semiconductor substrate assembly and comprising a sidewall;
a second dielectric layer overlying the first dielectric layer, wherein the sidewall is laterally recessed under the second dielectric layer to provide a recess;
a second portion of the second conductive layer on the second dielectric layer; and
an actuator membrane diffusion bonded to the second portion of the second conductive layer.
2. The printhead of claim 1 , wherein the first portion of the second conductive layer comprises an edge within the recess.
3. The printhead of claim 1 , wherein the second conductive layer is a self-patterned layer.
4. The printhead of claim 1 , further comprising a third dielectric layer underlying the first portion of the patterned first conductive layer and the first portion of the second conductive layer, wherein the sidewall is recessed between the second dielectric layer and the third dielectric layer.
5. The printhead of claim 1 , further comprising a third dielectric layer interposed between the first conductive layer and the first portion of the second conductive layer, wherein the sidewall is recessed between the second dielectric layer and the third dielectric layer.
6. The printhead of claim 1 , wherein:
the patterned first conductive layer further comprises a plurality of second portions that provide a plurality traces for the plurality of electrostatic actuators; and
the plurality of traces are directly interposed between the first portion of the second conductive layer and the semiconductor substrate assembly.
7. The printhead of claim 1 , wherein:
the first portion of the patterned first conductive layer comprises a first width; and
the first portion of the patterned second conductive layer comprises a second width that is wider than the first width.
8. A printer, comprising:
a printhead comprising a plurality of electrostatic actuators, wherein each electrostatic actuator comprises:
a patterned first conductive layer overlying a semiconductor substrate assembly and comprising a first portion;
a patterned second conductive layer having a first portion physically and electrically contacting the first portion of the patterned first conductive layer, wherein the first portion of the patterned second conductive layer is at least part of an actuator electrode;
a first dielectric layer overlying the semiconductor substrate assembly and comprising a sidewall;
a second dielectric layer overlying the first dielectric layer, wherein the sidewall is laterally recessed under the second dielectric layer to provide a recess;
a second portion of the second conductive layer on the second dielectric layer; and
an actuator membrane diffusion bonded to the second portion of the second conductive layer; and
a housing that encases the printhead.
9. The printer of claim 8 , wherein the first portion of the second conductive layer comprises an edge within the recess.
10. The printer of claim 8 , wherein the second conductive layer is a self-patterned layer.
11. The printer of claim 8 , wherein the printhead further comprises a third dielectric layer underlying the first portion of the patterned first conductive layer and the first portion of the second conductive layer, wherein the sidewall is recessed between the second dielectric layer and the third dielectric layer.
12. The printer of claim 8 , wherein the printhead further comprises a third dielectric layer interposed between the first conductive layer and the first portion of the second conductive layer, wherein the sidewall is recessed between the second dielectric layer and the third dielectric layer.
13. The printer of claim 8 , wherein:
the patterned first conductive layer further comprises a plurality of second portions that provide a plurality traces for the plurality of electrostatic actuators; and
the plurality of traces are directly interposed between the first portion of the second conductive layer and the semiconductor substrate assembly.
14. The printer of claim 8 , wherein:
the first portion of the patterned first conductive layer comprises a first width; and
the first portion of the patterned second conductive layer comprises a second width that is wider than the first width.