Thin film transistor
A thin film transistor suitable for being disposed on a substrate is provided. The thin film transistor includes a gate electrode, an organic gate dielectric layer, a metal oxide semiconductor layer, a source electrode and a drain electrode. The gate electrode is disposed on the substrate. The organic gate dielectric layer is disposed on the substrate to cover the gate electrode. The source electrode, the drain electrode and the metal oxide semiconductor layer are disposed above the organic gate dielectric layer, and the metal oxide semiconductor layer contacts with the source electrode and the drain electrode. Because the channel layer of the thin film transistor is a layer of metal oxide semiconductor formed at a lower temperature, thus the thin film transistor can be widely applied into various display applications such as flexible display devices.
1. A thin film transistor, configured for being disposed on a substrate, comprising:
a gate electrode, disposed on the substrate;
an organic gate dielectric layer, disposed on the substrate to cover the gate electrode;
a source electrode and a drain electrode, disposed above the organic gate dielectric layer;
a metal oxide semiconductor layer, disposed on the organic gate dielectric layer and contacts with the source electrode and the drain electrode; and
a barrier layer disposed between the metal oxide semiconductor layer and the organic gate dielectric layer, and disposed between the metal oxide semiconductor layer and the source electrode/drain electrode.
2. The thin film transistor of claim 1 , wherein the metal oxide semiconductor layer comprises indium gallium zinc oxide, indium zinc oxide or a combination thereof.
3. The thin film transistor of claim 1 , wherein the organic gate dielectric layer comprises a flexible organic material.
4. The thin film transistor of claim 1 , wherein the organic gate dielectric layer comprises an organic polymer.
5. The thin film transistor of claim 1 , wherein the barrier layer comprises silicon oxide.
6. A thin film transistor, configured for being disposed on a substrate, comprising:
a source electrode and a drain electrode, disposed on the substrate;
a metal oxide semiconductor layer, disposed above the substrate to cover the source electrode and the drain electrode;
an organic gate dielectric layer, disposed on the metal oxide semiconductor layer; and
a gate electrode, disposed on the organic gate dielectric layer; and
a barrier layer disposed between the metal oxide semiconductor layer and the organic gate dielectric layer.
7. The thin film transistor of claim 6 , wherein the metal oxide semiconductor layer comprises indium gallium zinc oxide, indium zinc oxide or a combination thereof.
8. The thin film transistor of claim 6 , wherein the organic gate dielectric layer comprises a flexible organic material.
9. The thin film transistor of claim 6 , wherein the organic gate dielectric layer comprises an organic polymer.
10. The thin film transistor of claim 6 , wherein the barrier layer comprises silicon oxide.