Transistors, methods of manufacturing the same, and electronic devices including transistors
Example embodiments disclose transistors, methods of manufacturing the same, and electronic devices including transistors. An active layer of a transistor may include a plurality of material layers (oxide layers) with different energy band gaps. The active layer may include a channel layer and a photo sensing layer. The photo sensing layer may have a single-layered or multi-layered structure. When the photo sensing layer has a multi-layered structure, the photo sensing layer may include a first material layer and a second material layer that are sequentially stacked on a surface of the channel layer. The first layer and the second layer may be alternately stacked one or more times.
1. A transistor comprising:
an active layer including an oxide semiconductor;
a source electrode and a drain electrode contacting two ends of the active layer, respectively;
a gate corresponding to the active layer; and
a gate insulating layer between the active layer and the gate,
wherein the active layer includes a first layer and a second layer that are sequentially stacked from a side of the gate, and the second layer includes a material having a smaller energy band gap than the first layer, and a photosensitivity of the second layer being higher than a photosensitivity of the first layer, and
the second layer includes a first material layer and a second material layer that are sequentially stacked on a surface of the first layer, the second material layer is farther from the gate than the first material layer, and an energy band gap of the second material layer is smaller than an energy band gap of the first layer.
2. The transistor of claim 1 , wherein the first layer comprises a ZnO-based oxide.
3. The transistor of claim 2 , wherein the ZnO-based oxide comprises at least one of hafnium (Hf), yttrium (Y), tantalum (Ta), zirconium (Zr), titanium (Ti), copper (Cu), nickel (Ni), chromium (Cr), indium (In), gallium (Ga), aluminum (Al), tin (Sn), and magnesium (Mg).
4. The transistor of claim 3 , wherein the first layer comprises HfInZnO or GaInZnO.
5. The transistor of claim 1 , wherein the second layer has a multi-layered structure.
6. The transistor of claim 1 , wherein an energy band gap of the first material layer is smaller than an energy band gap of the second material layer.
7. The transistor of claim 1 , wherein the first material layer comprises InZnO or TiOx.
8. The transistor of claim 1 , wherein an electrical resistance of the second material layer is greater than an electrical resistance of the first layer.
9. The transistor of claim 1 , wherein the second material layer and first layer comprise a ZnO-based oxide.
10. The transistor of claim 1 , wherein the first material layer and the second material layer are alternately stacked at least twice.
11. The transistor of claim 1 , wherein the gate is below the active layer.
12. The transistor of claim 1 , wherein the gate is above the active layer.
13. A transistor comprising:
an active layer including an oxide semiconductor;
a source electrode and a drain electrode contacting two ends of the active layer, respectively;
a gate corresponding to the active layer; and
a gate insulating layer between the active layer and a gate electrode,
wherein the active layer includes a first layer and a second layer that are sequentially stacked from a side of the gate, the second layer includes a material having a smaller energy band gap than the first layer, and a photosensitivity of the second layer being higher than a photosensitivity of the first layer, and
an oxygen content of the second material layer is greater than an oxygen content of the first layer.
14. An electronic device comprising:
the transistor of claim 1 .
15. A photo sensing circuit comprising:
the transistor of claim 1 .
16. The photo sensing circuit of claim 15 , further comprising:
a switching device connected to the transistor.
17. A transistor comprising:
an active layer including an oxide semiconductor;
a source electrode and a drain electrode contacting two ends of the active layer, respectively;
a gate corresponding to the active layer; and
a gate insulating layer between the active layer and the gate,
wherein the active layer includes a channel layer and a photo sensing layer, the photo sensing layer has a higher photosensitivity than the channel layer, and the channel layer is closer to the gate than the photo sensing layer, and
the photo sensing layer includes a first material layer and a second material layer that are sequentially stacked on a surface of the channel layer and an energy band gap of the second material layer is smaller than an energy band gap of the channel layer.
18. The transistor of claim 17 , wherein the first material layer and the second material layer are alternately stacked at least twice.