Electromechanical devices and methods for fabrication of the same
A fabricated electromechanical device is disclosed herein. An exemplary device includes, a substrate, at least one layer of a high-transconductance material separated from the substrate by a dielectric medium, a first electrode in electrical contact with the at least one layer of a high-transconductance material and separated from the substrate by at least one first supporting member, a second electrode in electrical contact with the layer of a high-transconductance material and separated from the substrate by at least one second supporting member, where the first electrode is electrically separate from the second electrode, and a third electrode separated from the at least one layer of high-transconductance material by a dielectric medium and separated from each of the first electrode and the second electrode by a dielectric medium.
1. A fabricated electromechanical device comprising:
a substrate;
one or more layers of a high-transconductance material separated from the substrate by a dielectric medium;
a first electrode in electrical contact with the one or more layers of a high-transconductance material and separated from the substrate by at least one first supporting member;
a second electrode in electrical contact with the one or more layers of a high-transconductance material and separated from the substrate by at least one second supporting member, wherein the first electrode is electrically separate from the second electrode; and
a third electrode separated from the one or more layers of high-transconductance material by the dielectric medium and separated from each of the first electrode and the second electrode by the dielectric medium;
wherein, when a voltage is applied to at least one of the first electrode and the second electrode within a range of a resonance frequency of the high-transconductance material, the high-transconductance material provides a self-sustaining oscillating signal to the third electrode.
2. The fabricated electromechanical device of claim 1 , wherein the substrate comprises of the third electrode.
3. The fabricated electromechanical device of claim 1 , wherein the third electrode comprises a localized electrode deposited on the substrate.
4. The fabricated electromechanical device of claim 1 , wherein the third electrode comprises a localized electrode submerged into the substrate.
5. The fabricated electromechanical device of claim 1 , wherein the high-transconductance material comprises graphene.
6. The fabricated electromechanical device of claim 1 , wherein the dielectric medium comprises air or a vacuum.
7. The fabricated electromechanical device of claim 1 , wherein the substrate comprises silicon.
8. The fabricated electromechanical device of claim 1 , wherein the first, second or third electrodes comprise metal electrodes.
9. The fabricated electromechanical device of claim 8 , wherein the metal electrodes comprise gold electrodes.
10. The fabricated electromechanical device of claim 1 , wherein the at least one first supporting member or the at least one second supporting member comprises of silicon dioxide.
11. The fabricated electromechanical device of claim 1 , further comprising circuitry which comprises of:
a first voltage source electrically connected to a power splitter;
a first capacitor electrically connected between the power splitter and the second electrode;
a second voltage source electrically connected between the first capacitor and the second electrode;
a first current amplifier electrically connected to the first electrode;
a second current amplifier electrically connected to the first current amplifier;
a frequency mixer electrically connected to the second current amplifier and the power splitter;
a second capacitor electrically connected between the high frequency mixer and the third electrode; and
a third voltage source electrically connected between the second capacitor and the third electrode.
12. The fabricated electromechanical device of claim 11 , further comprising:
a third capacitor electrically connected between the second voltage source and the second electrode;
a fourth capacitor electrically connected between the first electrode and the current amplifier; and
a fifth capacitor electrically connected between the third voltage source and the third electrode.
13. The fabricated electromechanical device of claim 11 , further comprising:
a first inductor electrically connected between the second voltage source and the second electrode; and
a second inductor electrically connected between the third voltage source and the third electrode.
14. The fabricated electromechanical device of claim 11 , wherein the second current amplifier is operable to provide an output.
15. A fabricated electromechanical device comprising:
a substrate;
one or more layers of a high-transconductance material separated from the substrate by a dielectric medium;
a first electrode in electrical contact with the one or more layers of a high-transconductance material and separated from the substrate by at least one first supporting member;
a second electrode in electrical contact with the one or more layers of a high-transconductance material and separated from the substrate by at least one second supporting member, wherein the first electrode is electrically separate from the second electrode;
a third electrode separated from the one or more layers of high-transconductance material by the dielectric medium and separated from each of the first electrode and the second electrode by the dielectric medium; and
circuitry comprising:
a first voltage source electrically connected to the first electrode;
a second voltage source electrically connected to the second electrode;
a third voltage source electrically connected to the third electrode;
wherein the first voltage source is electrically connected to the third voltage source; and
a first capacitor electrically connected between the first voltage and the third voltage source.
16. The fabricated electromechanical device of claim 15 , further comprising
a first inductor electrically connected between the first voltage source and the first electrode;
a second inductor electrically connected between the second voltage source and the second electrodes; and
a third inductor electrically connected between the third voltage source and the third electrode.
17. The fabricated electromechanical device of claim 15 , further comprising a second capacitor electrically connected between the second voltage source and the second electrode and further electrically connected to a ground.
18. The fabricated electromechanical device of claim 15 , further comprising a third capacitor connected between the first voltage source and the first electrode, wherein the third capacitor is further electrically connected, in series, to a first resistor and a ground.
19. The fabricated electromechanical device of claim 15 , further comprising a second resistor electrically connected between the first capacitor and the third electrode and further electrically connected to a ground.
20. The fabricated electromechanical device of claim 15 , further comprising a directional coupler electrically connected between the first capacitor and the third electrode and further electrically connected to an electrical reading device.
21. The fabricated electromechanical device of claim 15 , further comprising an amplifier electrically connected between the first capacitor and the third electrode.
22. The fabricated electromechanical device of claim 15 , further comprising a phase shifter electrically connected between the first capacitor and the third electrode.