Method for manufacturing nitride semiconductor self-supporting substrate and nitride semiconductor self-supporting substrate
The present invention provides a method for manufacturing a nitride semiconductor self-supporting substrate and a nitride semiconductor self-supporting substrate manufactured by this manufacturing method, the method including at least: a step of preparing a nitride semiconductor self-supporting substrate serving as a seed substrate; a step of epitaxially growing the same type of nitride semiconductor as the seed substrate on the seed substrate; and a step of slicing an epitaxially grown substrate subjected to the epitaxial growth into two pieces in parallel to an epitaxial growth surface. As a result, there is provided a method for manufacturing a large-diameter nitride semiconductor self-supporting substrate having an excellent crystal quality and small warp with good productivity at a low cost, etc.
1. A method for manufacturing a nitride semiconductor self-supporting substrate, comprising at least:
a step of preparing a nitride semiconductor self-supporting substrate serving as a seed substrate, wherein the nitride semiconductor self-supporting substrate consists essentially of nitride semiconductors;
a step of epitaxially growing the same type of nitride semiconductor as the seed substrate on the seed substrate to produce an epitaxially grown substrate comprising:
a seed substrate portion consisting of the seed substrate, and
an epitaxial layer portion consisting of an epitaxial layer formed on the seed substrate portion; and
a step of slicing the entire epitaxially grown substrate subjected to the epitaxial growth into only two pieces in parallel to an epitaxial growth surface to produce a first nitride semiconductor self-supporting substrate comprising mainly the seed substrate portion and a second nitride semiconductor self-supporting substrate comprising mainly the epitaxial layer portion,
wherein the first nitride semiconductor self-supporting substrate and the second nitride semiconductor self-supporting substrate are manufactured from the single seed substrate, and
wherein a thickness of the epitaxial layer formed at the epitaxial growth step is set to 1 mm or below.
2. The method for manufacturing a nitride semiconductor self-supporting substrate according to claim 1 , wherein at least one of the first nitride semiconductor self-supporting substrate and the second nitride semiconductor self-supporting substrate is again used as another seed substrate.
3. The method for manufacturing a nitride semiconductor self-supporting substrate according to claim 1 , wherein a plurality of the nitride semiconductor self-supporting substrates serving as the seed substrates are prepared, and the epitaxial growth is simultaneously performed with respect to the plurality of seed substrates in a same chamber.
4. The method for manufacturing a nitride semiconductor self-supporting substrate according to claim 2 , wherein a plurality of the nitride semiconductor self-supporting substrates serving as the seed substrates are prepared, and the epitaxial growth is simultaneously performed with respect to the plurality of seed substrates in a same chamber.
5. The method for manufacturing a nitride semiconductor self-supporting substrate according to claim 3 , wherein the number of nitride semiconductor self-supporting substrates defining the plurality of the nitride semiconductor self-supporting substrates serving as the seed substrates is eight or above.
6. The method for manufacturing a nitride semiconductor self-supporting substrate according to claim 4 , wherein the number of nitride semiconductor self-supporting substrates defining the plurality of the nitride semiconductor self-supporting substrates serving as the seed substrates is eight or above.
7. The method for manufacturing a nitride semiconductor self-supporting substrate according to claim 1 , wherein the sliced surface of each epitaxially grown substrate obtained by the slicing into two pieces is polished.
8. The method for manufacturing a nitride semiconductor self-supporting substrate according to claim 1 , wherein the epitaxial growth is performed based on an HVPE method.
9. The method for manufacturing a nitride semiconductor self-supporting substrate according to claim 1 , wherein each of the nitride semiconductor self-supporting substrate serving as the seed substrate and the nitride semiconductor self-supporting substrate to be manufactured is a GaN self-supporting substrate.
10. The method for manufacturing a nitride semiconductor self-supporting substrate according to claim 1 , wherein the nitride semiconductor self-supporting substrate serving as the seed substrate has a diameter of 37.5 mm or above, a thickness of 250 μm or above, and a warp value of 35 μm or below.
11. The method for manufacturing a nitride semiconductor self-supporting substrate according to claim 1 , wherein the nitride semiconductor self-supporting substrate serving as the seed substrate has a threading dislocation density of 5×10 7 /cm 2 or below.
12. The method for manufacturing a nitride semiconductor self-supporting substrate according to claim 1 , wherein a groove, along which a tool that is used to slice is guided, is formed, and a peripheral portion of the epitaxially grown substrate away from the groove is shaped via chamfering after the epitaxial growth step and before the slicing step.
13. The method for manufacturing a nitride semiconductor self-supporting substrate according to claim 1 , wherein the slicing step is carried out by using an inner diameter blade having a blade thickness of 250 μm or below, a single-wire saw having a wire diameter of 200 μm or below, or a single-blade saw having a blade thickness of 250 μm or below.
14. The method for manufacturing a nitride semiconductor self-supporting substrate according to claim 1 , wherein the slicing step is carried out by stacking a plurality of epitaxially grown substrates and using a multi-wire saw having a wire diameter of 200 μm or below or a multi-blade saw having a blade thickness of 250 μm or below to simultaneously slice the plurality of stacked epitaxially grown substrates.
15. A nitride semiconductor self-supporting substrate that is manufactured by the method for manufacturing a nitride semiconductor single crystal substrate according to claim 1 .
16. The nitride semiconductor self-supporting substrate according to claim 15 , wherein a diameter is 37.5 mm or above, a thickness is 250 μm or above, and a warp value is 35 μm or below.
17. The nitride semiconductor self-supporting substrate according to claim 15 , wherein a threading dislocation density is 5×10 7 /cm 2 or below.