Active vibration isolation device based on electromagnetic and aerostatic floatation
This invention relates to an active vibration isolation installation based on electromagnetic and aerostatic floatation which is essential for the super-precision measurement and manufacture. It mainly consists of an isolation platform, an intermediate sleeve and a base. The isolation platform supports any object(s) placed on the platform and is supported by the intermediate sleeve. And the intermediate sleeve is supported on the base which is fixed on the ground. This invention uses the combination electromagnetic and aerostatic floatation to achieve large bearing capacity while excellent vibration isolation performance is maintained. This invention realizes automatic control of stiffness, using closed-loop speed control methods. It is therefore conclude that this invention can impose an excellent inhibitory action on the vibration originating from surroundings and the platform itself.
1. An active vibration isolation device based on electromagnetic and aerostatic floatation, comprising
a base ( 3 ), having a cylindrical air chamber ( 12 ) inside the base which is supplied with air through an inlet hole for the base ( 10 );
an intermediate sleeve ( 2 ), which is lose fitted into the base and is supported by the air in the cylindrical air chamber ( 12 ) such that a gap is formed between the intermediate sleeve ( 2 ) and the base, the intermediate sleeve is provided with an annular air cavity ( 13 ) which is supplied with air through an air inlet hole for the intermediate sleeve ( 11 ) and by which an internal sidewall from an external sidewall of the sleeve ( 2 ) is separated; and an central cavity that is defined by the internal sidewall; the internal sidewall is provided with air bearing holes ( 6 ) communicating the central cavity with the annular air cavity ( 13 ); the external side wall is provided with static pressure air bearing holes ( 8 ) communicating the annular air cavity ( 13 ) with the gap between the base and the intermediate sleeve ( 2 ) so that a first air film can be formed within the gap;
an isolation platform ( 1 ), having a contour that is in compliance with the shape of the central cavity is fitted into the central cavity of the intermediate sleeve ( 2 ) such that an second air film is formed within an interspace, which is in communication with the air bearing holes ( 6 ) on the internal sidewall, is formed between the central cavity and the isolation platform ( 1 ) and is filled with air coming from the annular air cavity ( 13 );
an electromagnetic coil ( 5 ) arranged on a bottom surface of the isolation platform ( 1 );
a permanent magnet ( 4 ) arranged on a bottom surface of the intermediate sleeve ( 2 );
at least a first vertical sensor ( 7 ) that is mounted on a top surface of the intermediate sleeve; and
a second non-contact vertical displacement sensor ( 9 ) arranged within the cylindrical air chamber ( 12 ).
2. A device according to claim 1 , wherein the first non-contact vertical displacement sensor ( 7 ) and the second vertical sensor ( 9 ) are optical sensors, eddy current sensors or capacitance displacement sensors.
3. A device according to claim 1 , wherein the permanent magnet ( 4 ) is made of rubidium-iron-boron materials.
4. A device according to claim 1 , wherein the air is charged into annular air cavity ( 13 ) of the intermediate sleeve ( 2 ) through air inlet hole ( 11 ) such that the air pressure inside the annular air cavity ( 13 ) is maintained at approximately 0.4˜0.6 MPa.
5. The device according to claim 1 , wherein thickness of the first air film and the second air film is approximately 7 μm.