Method and apparatus for an automated tool handling system for a multilevel cleanspace fabricator
The present invention provides methods and apparatus capable of routine placement and replacement of fabricator tools in a designated tool location. The tool location can be selected from multiple tool locations arranged in a matrix with horizontal and vertical designations. The operation may be fully automated. In another aspect, the invention describes Cleanspace fabricators which use devices to routinely remove and place tooling.
1. A Cleanspace fabricator comprising:
a multilevel environment;
multiple processing tools, wherein said multiple processing tools are oriented in the multilevel environment; and
an automated tool replacement system, wherein the automated tool replacement system comprises:
a robotic tool handler capable of transporting a processing tool,
a connecting surface for the robotic tool handler, wherein said connecting
surface is connectable to the processing tool, and
a support structure for supporting the robotic tool handler, said support structure comprising an automation for transporting the robotic tool handler in at least one of a horizontal direction and a vertical direction,
wherein said support structure is supported along a track affixed to a ceiling or a floor.
2. The apparatus of claim 1 wherein the support structure additionally comprises:
wheels mounted proximate to a lowest portion of the support structure, wherein said support structure is functional to provide movement in the horizontal direction; and
further comprising a mechanization attached to the wheels, wherein said mechanization is functional to elevate the robotic tool handler thereby providing movement in the vertical direction.
3. The apparatus of claim 1 wherein the automation for transporting the robotic tool handler in the horizontal direction and the vertical direction comprises multiple rails and a drive unit operative to provide locomotion along at least one rail.
4. The apparatus of claim 1 additionally comprising a mechanized apparatus operative to position one or more of the multiple processing tools in an operation location.
5. The apparatus of claim 1 additionally comprising a robotic automation residing within the Cleanspace to move substrate lots from a first tool of the multiple tools to a second tool of the multiple tools.
6. The apparatus of claim 1 additionally comprising circuitry functional to provide one or more of: wired or wireless electronic communication between at least two of: a processing tool held by the robotic tool handler, a processing tool adjacent to the robotic tool handler and cleanspace fabricator automation.
7. The apparatus of claim 1 additionally comprising electronically interlocked safety systems functional to control an ability of a fabricator tool body to be moved into or out of the robotic tool handler at various positions.