Degassing apparatus adapted to process substrates in multiple tiers with second actuator
Substrate transport systems, apparatus, and methods are described. In one aspect, the systems are disclosed having vertically stacked transfer chamber bodies. In one embodiment, a common robot apparatus services process chambers or load lock chambers coupled to upper and lower transfer chamber bodies. In another embodiment, separate robot apparatus service the process chambers and/or load lock chambers coupled to upper and lower transfer chamber bodies, and an elevator apparatus transfers the substrates between the various elevations. Degassing apparatus are described, as are numerous other aspects.
1. A degassing apparatus, comprising:
a housing including at least one entrance;
a heated platform adapted to heat a substrate within the housing; and
a cooling platform adapted to cool a substrate within the housing;
a first actuator coupled to pins and adapted to carry a substrate to a location proximate to the cooling platform; and
a second actuator adapted to lift the heated platform and a substrate proximate to a supplementary heating source.
2. The degassing apparatus of claim 1 , wherein the supplementary heating source comprises at least one heat lamp.
3. The degassing apparatus of claim 1 , wherein the heated platform comprises a resistance heater adapted to generate a temperature of a substrate of greater than about 100° C.
4. The degassing apparatus of claim 1 , comprising a resistance heater on the heated platform and a supplementary heat source.
5. The degassing apparatus of claim 1 , comprising at least two slit valves.