IP Library › Granted Patent US 9,178,137
Granted Patent B2
US 9,178,137 · App. 13/963,682 · Granted Nov 3, 2015

Magnetoresistive element and magnetic memory

Inventors: Youngmin Eeh (Kawagoe, JP); Katsuya Nishiyama (Yokohama, JP); Daisuke Ikeno (Yokkaichi, JP); Toshihiko Nagase (Tokyo, JP); Tadashi Kai (Tokyo, JP); Daisuke Watanabe (Kai, JP)
H01L43/12H01L43/08H01L27/226
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Quick Facts
Patent No.
US 9,178,137
App. No.
13/963,682
Granted
Nov 3, 2015
Kind
B2
Abstract

A magnetoresistive element includes first and magnetic layers, first and second non-magnetic layers and a W layer. Each of the first and second magnetic layers includes an axis of easy magnetization in a direction perpendicular to a film plane. The first magnetic layer has a variable magnetization direction. The second magnetic layer has an invariable magnetization direction. The first non-magnetic layer is provided between the first and second magnetic layers. The second non-magnetic layer is arranged on a surface of the first magnetic layer opposite to a surface on which the first non-magnetic layer is arranged and contains MgO. The W layer is arranged on a surface of the second non-magnetic layer opposite to a surface on which the first magnetic layer is arranged, and is in contact with the surface of the second non-magnetic layer.

Claims (23)

1. A magnetoresistive element comprising:

a first magnetic layer which includes an axis of easy magnetization in a direction perpendicular to a film plane and a variable magnetization direction;

a second magnetic layer which includes an axis of easy magnetization in the direction perpendicular to the film plane and an invariable magnetization direction;

a first non-magnetic layer provided between the first magnetic layer and the second magnetic layer;

a second non-magnetic layer arranged on a surface of the first magnetic layer opposite to a surface on which the first non-magnetic layer is arranged, the second non-magnetic layer containing MgO; and

a W layer arranged on a surface of the second non-magnetic layer opposite to a surface on which the first magnetic layer is arranged, the W layer being in contact with the surface of the second non-magnetic layer, and the W layer including an amorphous state.

2. The magnetoresistive element according to claim 1 , further comprising:

a CoFeB layer arranged on a surface of the W layer opposite to a surface on which the second non-magnetic layer is arranged, the CoFeB layer being in contact with the surface of the W layer.

3. The magnetoresistive element according to claim 1 , wherein the first non-magnetic layer contains MgO.

4. The magnetoresistive element according to claim 3 , wherein the second non-magnetic layer contains oxygen per unit volume in an amount less than that of the first non-magnetic layer.

5. The magnetoresistive element according to claim 1 , wherein the first magnetic layer includes a first CoFe-containing layer, and a second CoFe-containing layer, the first CoFe-containing layer contacts the second non-magnetic layer, and the second CoFe-containing layer contacts the first non-magnetic layer.

6. The magnetoresistive element according to claim 1 , wherein the MgO contained in the second non-magnetic layer contains oxygen in an amount less than that of MgO with a stoichiometric composition.

7. A magnetoresistive element comprising:

a first magnetic layer which includes an axis of easy magnetization in a direction perpendicular to a film plane and a variable magnetization direction;

a second magnetic layer which includes an axis of easy magnetization in the direction perpendicular to the film plane and an invariable magnetization direction;

a first non-magnetic layer provided between the first magnetic layer and the second magnetic layer;

a second non-magnetic layer arranged on a surface of the first magnetic layer opposite to a surface on which the first non-magnetic layer is arranged, the second non-magnetic layer containing MgO; and

a Ti layer arranged on a surface of the second non-magnetic layer opposite to a surface on which the first magnetic layer is arranged, the Ti layer being in contact with the surface of the second non-magnetic layer, and the Ti layer including a polycrystalline state.

8. The magnetoresistive element according to claim 7 , wherein the first non-magnetic layer contains MgO.

9. The magnetoresistive element according to claim 8 , wherein the second non-magnetic layer contains oxygen per unit volume in an amount less than that of the first non-magnetic layer.

10. The magnetoresistive element according to claim 8 , wherein the first magnetic layer includes a first CoFe-containing layer and a second CoFe-containing layer, the first CoFe-containing layer contacts the second non-magnetic layer, and the second CoFe-containing layer contacts the first non-magnetic layer.

11. The magnetoresistive element according to claim 8 , wherein the first magnetic layer contains a CoFe-containing layer, a first surface of the CoFe-containing layer contacts the second non-magnetic layer, and a second surface opposite to the first surface of the CoFe-containing layer contacts the first non-magnetic layer.

12. The magnetoresistive element according to claim 7 , wherein the MgO contained in the second non-magnetic layer contains oxygen in an amount less than that of MgO with a stoichiometric composition.

Assignments (5)
CHANGE OF NAME AND ADDRESS Recorded Jan 22, 2021
From: K.K. PANGEA
To: TOSHIBA MEMORY CORPORATION
Reel/Frame 055669/0401 →
MERGER Recorded Jan 22, 2021
From: TOSHIBA MEMORY CORPORATION
To: K.K. PANGEA
Reel/Frame 055659/0471 →
CHANGE OF NAME AND ADDRESS Recorded Jan 22, 2021
From: TOSHIBA MEMORY CORPORATION
To: KIOXIA CORPORATION
Reel/Frame 055669/0001 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Aug 24, 2017
From: KABUSHIKI KAISHA TOSHIBA
To: TOSHIBA MEMORY CORPORATION
Reel/Frame 043709/0035 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded May 12, 2016
From: EEH, YOUNGMIN; NISHIYAMA, KATSUYA; IKENO, DAISUKE; NAGASE, TOSHIHIKO; KAI, TADASHI; WATANABE, DAISUKE
To: KABUSHIKI KAISHA TOSHIBA
Reel/Frame 038570/0966 →
Continuity (2)
Provisional Application 61804478 · Mar 22, 2013
Related Publication 20140284539A1 · Sep 25, 2014