Edge exclusion control with adjustable plasma exclusion zone ring
Systems and methods for edge exclusion control are described. One of the systems includes a plasma chamber. The plasma processing chamber includes a lower electrode having a surface for supporting a substrate. The lower electrode is coupled with a radio frequency (RF) power supply. The plasma processing chamber further includes an upper electrode disposed over the lower electrode. The upper electrode is electrically grounded. The plasma processing chamber includes an upper dielectric ring surrounding the upper electrode. The upper dielectric ring is moved using a mechanism for setting a vertical position of the upper dielectric ring separate from a position of the upper electrode. The system further includes an upper electrode extension surrounding the upper dielectric ring. The upper electrode extension is electrically grounded. The system also includes a lower electrode extension surrounding the lower dielectric ring. The lower electrode extension is arranged opposite the upper electrode extension.
1. A plasma processing chamber for bevel edge cleaning, the chamber comprising:
an upper electrode;
a lower electrode positioned below the upper electrode;
an upper plasma exclusion zone (PEZ) ring peripheral to the upper electrode, the PEZ ring being settable to multiple positions toward or away from the lower electrode without vertical adjustment of the upper electrode;
an upper electrode extension peripheral to the upper PEZ ring; and
a lower electrode extension surrounding the lower electrode.
2. The plasma processing chamber of claim 1 ,
wherein the upper PEZ ring is configured to be driven by a different driver than a driver for driving the upper electrode.
3. The plasma processing chamber of claim 1 , wherein the upper electrode is configured to be coupled with ground to generate a voltage difference between the upper electrode and the lower electrode.
4. The plasma processing chamber of claim 1 , wherein the lower electrode is configured to support a substrate.
5. The plasma processing chamber of claim 1 , wherein the lower electrode is configured to be supplied with a radiofrequency (RF) power via an impedance matching circuit to generate a voltage difference between the upper electrode and the lower electrode.
6. The plasma processing chamber of claim 1 , wherein the upper PEZ ring is configured to be driven by a different driver than a driver for driving the upper electrode extension.
7. The plasma processing chamber of claim 1 , wherein the upper electrode extension is configured to be grounded when the lower electrode extension is supplied with a radiofrequency (RF) power.
8. The plasma processing chamber of claim 1 , further comprising a lower PEZ ring configured to shield the lower electrode from plasma generated within an edge exclusion region.
9. The plasma processing chamber of claim 1 , wherein the upper electrode lacks a flange to clamp the upper PEZ ring.
10. The plasma processing chamber of claim 1 , further comprising a dielectric ring configured to electrically isolate the lower electrode from a bottom wall of the chamber.
11. The plasma processing chamber of claim 1 , wherein the upper PEZ ring is configured to shield the upper electrode from plasma generated within an edge exclusion region.
12. The plasma processing chamber of claim 1 , wherein the upper PEZ ring is configured to move from a first position to a second position during a lack of movement of the upper electrode and the upper electrode extension.
13. The plasma processing chamber of claim 1 , further comprising a lower PEZ ring, wherein an edge of the upper PEZ ring lacks alignment with an edge of the lower PEZ ring.
14. The plasma processing chamber of claim 1 , wherein an edge of the upper electrode extension is aligned with an edge of the lower electrode extension.
15. The plasma processing chamber of claim 1 , wherein an edge exclusion region is formed between a portion of a substrate and an edge of the substrate, wherein a surface area of the substrate within the edge exclusion region changes when the upper PEZ ring engages with the multiple positions.