Method of fabricating fin FET and method of fabricating device
In fin FET fabrication, side walls of a semiconductor fin formed on a substrate have certain roughness. Using such fins having roughness may induce variations in characteristics between transistors due to their shapes or the like. An object of the present invention is to provide a fin FET fabrication method capable of improving device characteristic by easily reducing the roughness of the side walls of fins after formation. In one embodiment of the present invention, side walls of a semiconductor fin are etched by an ion beam extracted from a grid to reduce the roughness of the side walls.
1. A method of fabricating a fin FET, the method comprising the steps of:
preparing a substrate which comprises a semiconductor fin thereon; and
ion beam etching a side wall of the semiconductor fin using an ion beam extracted from a grid,
wherein, in the ion etching step:
the substrate is positioned with a tilt with respect to the grid;
the ion beam etching is performed with an amount of energy of the ion beam set such that an amount of energy of the ion beam incident in an extending direction of the fin is larger than an amount of energy of the ion beam incident in any other direction;
the substrate is rotated about an axis perpendicular to a plane of the substrate;
the substrate rotation involves repeating rotation and rotation stop; and
rotation stop time of the substrate is longer when the grid is positioned in the extending direction of the fin, than when the grid is positioned in any other direction.
2. The method according to claim 1 , wherein, in the ion beam etching step, electric power applied to a plasma source for producing the ion beam is controlled so that a density of ions in the ion beam is higher when the grid is positioned in an extending direction of a groove of the fin, than when the grid is positioned in any other direction.
3. The method according to claim 1 , wherein the substrate is rotated with a tilt of 20 degrees to 80 degrees with respect to the grid.
4. The method according to claim 1 , wherein a tilt angle of the substrate with respect to the grid is larger when the ion beam is incident in the extending direction of the fin, than when the ion beam is incident in any other direction.
5. The method according to claim 1 , further comprising a step of performing reactive-ion etching for forming the fin before the ion beam etching step.
6. A method of fabricating a fin FET, the method comprising the steps of:
preparing a substrate which comprises a semiconductor fin thereon; and
ion beam etching a side wall of the semiconductor fin using an ion beam extracted from a grid,
wherein, in the ion etching step:
the substrate is positioned with a tilt with respect to the grid;
the ion beam etching is performed with an amount of energy of the ion beam set such that an amount of energy of the ion beam incident in an extending direction of the fin is larger than an amount of energy of the ion beam incident in any other direction;
the substrate is rotated about an axis perpendicular to a plane of the substrate;
the grid includes a first electrode subject to a positive voltage, a second electrode subject to a voltage lower than that at the first electrode and positioned closer to the substrate than the first electrode, and a ground electrode positioned closer to the substrate than the second electrode; and
the voltage applied to the first electrode is higher when the grid is positioned in the extending direction of the fin, than when the grid is positioned in any other direction.
7. The method according to claim 6 , wherein, in the ion etching step, a rotational speed of the substrate is lower when the grid is positioned in the extending direction of the fin, than when the grid is positioned in any other direction.
8. The method according to claim 6 , wherein the substrate is rotated with a tilt of 20 degrees to 80 degrees with respect to the grid.
9. The method according to claim 6 , wherein a tilt angle of the substrate with respect to the grid is larger when the ion beam is incident in the extending direction of the fin, than when the ion beam is incident in any other direction.
10. The method according to claim 6 , further comprising a step of performing reactive-ion etching for forming the fin before the ion beam etching step.