IP Library › Granted Patent US 9,196,335
Granted Patent B2
US 9,196,335 · App. 13/962,913 · Granted Nov 24, 2015

Magnetic memory

Inventors: Katsuaki Natori (Yokohama, JP); Koji Yamakawa (Tokyo, JP)
Assignee: KABUSHIKI KAISHA TOSHIBA
G11C11/161H01L43/08B82Y25/00
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Quick Facts
Patent No.
US 9,196,335
App. No.
13/962,913
Granted
Nov 24, 2015
Kind
B2
Abstract

According to one embodiment, a magnetic memory includes magnetoresistive effect elements each including a first magnetic layer, a tunnel barrier layer, and a second magnetic layer which are successively stacked, and a ferroelectric capacitor provided above the magnetoresistive effect elements via an insulating layer, and including a lower electrode, a ferroelectric film, and an upper electrode which are successively stacked.

Claims (27)

1. A magnetic memory comprising:

magnetoresistive effect elements each including a first magnetic layer, a tunnel barrier layer, and a second magnetic layer which are successively stacked; and

a ferroelectric capacitor provided above the magnetoresistive effect elements via an insulating layer, and including a lower electrode, a ferroelectric film, and an upper electrode which are successively stacked.

2. The magnetic memory of claim 1 , wherein each of the first magnetic layer and the second magnetic layer has a magnetic anisotropy in a perpendicular direction to a film surface.

3. The magnetic memory of claim 2 , further comprising an insulating layer provided on the ferroelectric capacitor and having a Young's modulus which is lower than a Young's modulus of the ferroelectric film.

4. The magnetic memory of claim 1 , wherein each of the first magnetic layer and the second magnetic layer includes an alloy containing cobalt (Co) and iron (Fe).

5. The magnetic memory of claim 1 , wherein the tunnel barrier layer includes magnesium oxide (MgO).

6. The magnetic memory of claim 1 , wherein a voltage, which is applied between the lower electrode and the upper electrode, is different between a case in which data is written to the magnetoresistive effect element and a case in which the magnetoresistive effect element retains data.

7. The magnetic memory of claim 2 , wherein a voltage is applied between the lower electrode and the upper electrode such that a strain in the perpendicular direction of the ferroelectric film decreases when data is written to the magnetoresistive effect element.

8. The magnetic memory of claim 2 , wherein a voltage is applied between the lower electrode and the upper electrode such that a strain in the perpendicular direction of the ferroelectric film increases when the magnetoresistive effect element retains data.

9. The magnetic memory of claim 1 , further comprising a driver electrically connected to the upper electrode and the lower electrode and configured to apply a voltage between the upper electrode and the lower electrode.

10. The magnetic memory of claim 1 , further comprising select transistors formed on a semiconductor substrate,

wherein one end of a current path of each of the select transistors is electrically connected to one end of each of the magnetoresistive effect elements.

11. The magnetic memory of claim 1 , wherein each of the first magnetic layer and the second magnetic layer has a magnetic anisotropy in an in-plane direction.

12. The magnetic memory of claim 11 , further comprising an insulating layer provided on the ferroelectric capacitor and having a Young's modulus which is equal to or higher than a Young's modulus of the ferroelectric film.

13. A magnetic memory comprising:

a magnetoresistive effect element including a first magnetic layer, a tunnel barrier layer, and a second magnetic layer which are successively stacked;

a ferroelectric layer covering a top surface and a side surface of the magnetoresistive effect element; and

a first electrode and a second electrode provided in the ferroelectric layer in a manner to sandwich the magnetoresistive effect element from both sides.

14. The magnetic memory of claim 13 , wherein each of the first magnetic layer and the second magnetic layer has a magnetic anisotropy in a perpendicular direction to a film surface.

15. The magnetic memory of claim 13 , wherein each of the first magnetic layer and the second magnetic layer includes an alloy containing cobalt (Co) and iron (Fe).

16. The magnetic memory of claim 13 , wherein the tunnel barrier layer includes magnesium oxide (MgO).

17. The magnetic memory of claim 13 , wherein a voltage, which is applied between the first electrode and the second electrode, is different between a case in which data is written to the magnetoresistive effect element and a case in which the magnetoresistive effect element retains data.

18. The magnetic memory of claim 14 , wherein a voltage is applied between the first electrode and the second electrode such that a strain in an in-plane direction of the ferroelectric layer decreases when data is written to the magnetoresistive effect element.

19. The magnetic memory of claim 14 , wherein a voltage is applied between the first electrode and the second electrode such that a strain in an in-plane direction of the ferroelectric layer increases when the magnetoresistive effect element retains data.

20. The magnetic memory of claim 13 , further comprising a driver electrically connected to the first electrode and the second electrode and configured to apply a voltage between the first electrode and the second electrode.

21. The magnetic memory of claim 13 , wherein the ferroelectric layer comprises PZT [Pb(Zr, Ti)O 3 ], a BiTiO-based material, a BiSiO-based material, an SrTaNbO-based material, an SrBiTaO-based material, or a BiLaTiO-based material.

Assignments (5)
CHANGE OF NAME AND ADDRESS Recorded Jan 22, 2021
From: K.K. PANGEA
To: TOSHIBA MEMORY CORPORATION
Reel/Frame 055669/0401 →
MERGER Recorded Jan 22, 2021
From: TOSHIBA MEMORY CORPORATION
To: K.K. PANGEA
Reel/Frame 055659/0471 →
CHANGE OF NAME AND ADDRESS Recorded Jan 22, 2021
From: TOSHIBA MEMORY CORPORATION
To: KIOXIA CORPORATION
Reel/Frame 055669/0001 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Aug 24, 2017
From: KABUSHIKI KAISHA TOSHIBA
To: TOSHIBA MEMORY CORPORATION
Reel/Frame 043709/0035 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Nov 15, 2013
From: NATORI, KATSUAKI; YAMAKAWA, KOJI
To: KABUSHIKI KAISHA TOSHIBA
Reel/Frame 031610/0080 →
Continuity (2)
Provisional Application 61785514 · Mar 14, 2013
Related Publication 20140269033A1 · Sep 18, 2014