Acoustic sensor and method of manufacturing the same
In an acoustic sensor, a diaphragm arranged on an upper side of a silicon substrate includes a back chamber, and an anchor supports the diaphragm. An insulating plate portion fixed to an upper surface of the silicon substrate covers the diaphragm with a gap. A conductive fixed electrode film arranged on a lower surface of the plate portion configures a back plate. The change in electrostatic capacitance between the fixed electrode film and the diaphragm outputs to the outside from a fixed side electrode pad and a movable side electrode pad as an electric signal. A protective film is arranged continuously with the plate portion at an outer periphery of the plate portion. The protective film covers the outer peripheral part of the upper surface of the silicon substrate, and the outer periphery of the protective film coincides with the outer periphery of the upper surface of the silicon substrate.
1. A manufacturing method of an acoustic sensor, wherein the acoustic sensor comprises:
a semiconductor substrate comprising a back chamber;
a conductive diaphragm arranged on an upper side of the semiconductor substrate through anchors;
an insulating fixed film fixed on an upper surface of the semiconductor substrate to cover the conductive diaphragm with a gap;
a conductive fixed electrode film arranged on the insulating fixed film at a position facing the conductive diaphragm; and
an electrode terminal that outputs a change in electrostatic capacitance between the conductive fixed electrode film and the conductive diaphragm to an outside as an electric signal,
wherein the manufacturing method comprises:
forming the conductive diaphragm inside a sacrifice layer deposited on the upper surface of the semiconductor substrate;
forming a space shaping portion in which a surface comprises an inner surface shape of the insulating fixed film by etching the sacrifice layer;
forming a thick film layer on an outer side of the space shaping portion separate from the space shaping portion by etching the sacrifice layer;
forming the insulating fixed film on the space shaping portion of the sacrifice layer to cover an outer peripheral part of the upper surface of the semiconductor substrate with a protective film made from a material identical to the insulating fixed film so that an outer periphery of the protective film coincides with an outer periphery of the upper surface of the semiconductor substrate;
forming the back chamber in the semiconductor substrate; and
supporting the conductive diaphragm in space by removing the sacrifice layer by etching and forming a gap between the conductive diaphragm and the inner surface of the insulating fixed film,
wherein an adhesive layer that is made from a material different from the insulating fixed film and that is thinner than the protective film is formed on an outer side of the thick film layer after forming the space shaping portion.
2. The manufacturing method of the acoustic sensor according to claim 1 , wherein the adhesive layer and the thick film layer are formed from the same material.
3. The manufacturing method of the acoustic sensor according to claim 1 , wherein the adhesive layer and the thick film layer are formed from an insulating material.
4. The manufacturing method of the acoustic sensor according to claim 1 , wherein a thickness of the adhesive layer is smaller than an interval between an inner surface of a back plate comprising the insulating fixed film and the conductive fixed electrode film and the conductive diaphragm.
5. The manufacturing method of the acoustic sensor according to claim 1 , wherein a thickness of the thick film layer is greater than an interval between an inner surface of a back plate comprising the insulating fixed film and the conductive fixed electrode film and the conductive diaphragm.
6. The manufacturing method of the acoustic sensor according to claim 1 , wherein the thickness of the thick film layer is equal to a distance of a sum of an interval between an inner surface of a back plate comprising the insulating fixed film and the conductive fixed electrode film and the conductive diaphragm, and an interval between the upper surface of the semiconductor substrate and the conductive diaphragm.
7. The manufacturing method of the acoustic sensor according to claim 1 ,
wherein the protective film and the insulating fixed film are continuously formed at the same time, and
wherein a boundary region of the protective film and the insulating fixed film is adhered to the upper surface of the semiconductor substrate.