Semiconductor package with package-on-package stacking capability and method of manufacturing the same
A method of making a semiconductor package with package-on-package stacking capability is characterized by the step of attaching a chip-on-interposer subassembly on a base carrier with the chip inserted into a through opening of the base carrier and the interposer laterally extending beyond the through opening. The interposer provides primary fan-out routing for the chip whereas dual buildup circuitries formed on both opposite sides of the base carrier provides further fan-out routing and are electrically connected to each other by plated through holes to provide the package with stacking capacity.
1. A method of making a semiconductor package with package-on-package stacking capability, comprising the steps of:
providing a semiconductor device;
providing an interposer that includes a first surface, a second surface opposite to the first surface, first contact pads on the first surface, second contact pads on the second surface, and through vias that electrically couple the first contact pads and the second contact pads;
electrically coupling the semiconductor device to the second contact pads of the interposer by a plurality of bumps to form a chip-on-interposer subassembly;
providing a base carrier having a first surface, an opposite second surface, and a through opening that extends through the base carrier between the first surface and the second surface thereof;
attaching the chip-on-interposer subassembly to the base carrier using an adhesive with the semiconductor device inserted into the through opening and the interposer laterally extending beyond the through opening;
with the chip-on-interposer subassembly attached to the base carrier, forming a first buildup circuitry on the first surface of the interposer and the first surface of the base carrier, wherein the first buildup circuitry is electrically coupled to the first contact pads of the interposer through first conductive vias of the first buildup circuitry;
forming a second buildup circuitry on the semiconductor device and the second surface of the base carrier; and
forming plated through holes that extend through the base carrier to provide electrical and thermal connections between the first buildup circuitry and the second buildup circuitry.
2. The method of claim 1 , wherein the step of electrically coupling the semiconductor device to the second contact pads of the interposer is performed on a panel scale, and a singulation step is executed to separate individual chip-on-interposer subassemblies before the step of attaching the chip-on-interposer subassembly to the base carrier.
3. The method of claim 1 , wherein the base carrier further includes a registration mark on and projecting from the first surface thereof, and the chip-on-interposer subassembly is attached to the base carrier with the registration mark laterally aligned with and in close proximity to peripheral edges of the interposer and extending beyond the second surface of the interposer.
4. The method of claim 1 , wherein the through opening of the base carrier has shielding sidewalls that laterally cover peripheral edges of the semiconductor device.
5. The method of claim 4 , wherein the second buildup circuitry comprises a metal shield that is aligned with the semiconductor device, and the metal shield and the shielding sidewalls are electrically coupled to at least one of the first contact pads of the interposer for grounding through the first buildup circuitry.
6. The method of claim 5 , wherein the metal shield is a continuous metal layer and laterally extends outward at least to peripheral edges of the semiconductor device.
7. A semiconductor package with package-on-package stacking capability prepared by a method that comprises steps of:
providing a semiconductor device;
providing an interposer that includes a first surface, a second surface opposite to the first surface, first contact pads on the first surface, second contact pads on the second surface, and through vias that electrically couple the first contact pads and the second contact pads;
electrically coupling the semiconductor device to the second contact pads of the interposer by a plurality of bumps to form a chip-on-interposer subassembly;
providing a base carrier having a first surface, an opposite second surface, and a through opening that extends through the base carrier between the first surface and the second surface thereof;
attaching the chip-on-interposer subassembly to the base carrier using an adhesive with the semiconductor device inserted into the through opening and the interposer laterally extending beyond the through opening;
with the chip-on-interposer subassembly attached to the base carrier, forming a first buildup circuitry on the first surface of the interposer and the first surface of the base carrier, wherein the first buildup circuitry is electrically coupled to the first contact pads of the interposer through first conductive vias of the first buildup circuitry;
forming a second buildup circuitry on the semiconductor device and the second surface of the base carrier; and
forming plated through holes that extend through the base carrier to provide electrical and thermal connections between the first buildup circuitry and the second buildup circuitry.
8. A semiconductor package with package-on-package stacking capability, comprising:
a semiconductor device;
an interposer having a first surface, a second surface opposite to the first surface, first contact pads on the first surface, second contact pads on the second surface, and through vias that electrically couple the first contact pads and the second contact pads;
a base carrier having a first surface, an opposite second surface, and a through opening that extends through the base carrier between the first surface and the second surface;
a first buildup circuitry formed on the first surface of the interposer and the first surface of the base carrier, wherein the first buildup circuitry is electrically coupled to the first contact pads of the interposer through first conductive vias of the first buildup circuitry;
a second buildup circuitry formed on the semiconductor device and the second surface of the base carrier; and
plated through holes that extend through the base carrier for providing electrical and thermal connections between the first buildup circuitry and the second buildup circuitry,
wherein the semiconductor device is electrically coupled to the second contact pads of the interposer by a plurality of bumps to form a chip-on-interposer subassembly; and
the chip-on-interposer subassembly is attached to the base carrier using an adhesive with the semiconductor device enclosed in the through opening and the interposer laterally extending beyond the through opening.
9. The semiconductor package with package-on-package stacking capability according to claim 8 , wherein the base carrier further includes a registration mark on and projecting from the first surface thereof, and the registration mark is laterally aligned with and in close proximity to peripheral edges of the interposer and extends beyond the second surface of the interposer.
10. The semiconductor package with package-on-package stacking capability according to claim 8 , wherein the through opening of the base carrier has shielding sidewalls that laterally cover peripheral edges of the semiconductor device.
11. The semiconductor package with package-on-package stacking capability according to claim 10 , wherein the second buildup circuitry comprises a metal shield that is aligned with the semiconductor device, and the metal shield and the shielding sidewalls are electrically coupled to at least one of the first contact pads of the interposer for grounding through the first buildup circuitry.
12. The method of claim 11 , wherein the metal shield is a continuous metal layer and laterally extends outward at least to peripheral edges of the semiconductor device.