Thin film transistor substrate with intermediate insulating layer and display using the same
Provided are a thin film transistor (TFT) substrate and a display using the same. A TFT substrate includes: a substrate, a first TFT on the substrate, including: a polycrystalline semiconductor layer, a first gate electrode thereover, a first source electrode, and a first drain electrode, a second TFT on the substrate, including: a second gate electrode, an oxide semiconductor layer on the second gate electrode, a second source electrode, and a second drain electrode, an intermediate insulating layer including a nitride layer, on the first gate electrode, and an oxide layer covering the second gate electrode, on the intermediate insulating layer, on the oxide layer, and overlapping the second gate electrode, wherein the first source, first drain, and second gate electrodes are between the intermediate insulating layer and the oxide layer, and wherein the second source and the second drain electrodes are on the oxide semiconductor layer.
1. A thin film transistor substrate, comprising:
a substrate;
a first thin film transistor disposed on the substrate, the first thin film transistor comprising:
a polycrystalline semiconductor layer;
a first gate electrode over the polycrystalline semiconductor layer;
a first source electrode; and
a first drain electrode;
a gate insulating layer covering the polycrystalline semiconductor layer;
a second thin film transistor disposed on the substrate over the gate insulating layer, the second thin film transistor comprising:
a second gate electrode;
an oxide semiconductor layer on the second gate electrode;
a second source electrode; and
a second drain electrode;
an intermediate insulating layer comprising a nitride layer and disposed on the first gate electrode; and
an oxide layer covering the second gate electrode and disposed on the intermediate insulating layer,
wherein the oxide semiconductor layer is disposed on the oxide layer and overlaps the second gate electrode,
wherein the first source electrode, the first drain electrode, and the second gate electrode are disposed between the intermediate insulating layer and the oxide layer,
wherein the second source electrode and the second drain electrode are disposed on the oxide semiconductor layer,
wherein a gate line is disposed between the gate insulating layer and the intermediate insulating laver, and
wherein a data line and the second gate electrode are disposed between the intermediate insulating layer and the oxide laver.
2. The thin film transistor substrate of claim 1 , wherein the first gate electrode is disposed on the gate insulating layer and overlaps the polycrystalline semiconductor layer.
3. The thin film transistor substrate of claim 2 , wherein:
the first source electrode is connected to one portion of the polycrystalline semiconductor layer through a source contact hole penetrating the intermediate insulating layer and the gate insulating layer;
the first drain electrode is connected to another portion of the polycrystalline semiconductor layer through a drain contact hole penetrating the intermediate insulating layer and the gate insulating layer;
the second source electrode contacts one portion of the oxide semiconductor layer; and
the second drain electrode contacts another portion of the oxide semiconductor layer.
4. The thin film transistor substrate of claim 3 , wherein the first source electrode and the first drain electrode comprise a same material and are disposed in a same layer as the second gate electrode.
5. The thin film transistor substrate of claim 4 , wherein the second gate electrode is connected to the gate line, which comprises the same material and is disposed in a same layer as the first gate electrode, through a gate contact hole penetrating the intermediate insulating layer.
6. The thin film transistor substrate of claim 4 , wherein the second source electrode is connected to the data line, which comprises the same material and is disposed in a same layer as the second gate electrode, through a data contact hole.
7. The thin film transistor substrate of claim 1 , wherein the intermediate insulating layer further comprises a lower oxide layer.
8. The thin film transistor substrate of claim 7 , wherein the nitride layer is disposed on the lower oxide layer.
9. A thin film transistor substrate, comprising:
a substrate;
a first semiconductor layer disposed on the substrate, the first semiconductor layer comprising a polycrystalline semiconductor material;
a gate insulating layer covering the first semiconductor layer;
a first gate electrode disposed on the gate insulating layer, the first gate electrode overlapping the first semiconductor layer;
an intermediate insulating layer comprising a nitride layer, the intermediate insulating layer covering the first gate electrode;
a second gate electrode, a first source electrode, and a first drain electrode disposed on the intermediate insulating layer;
an oxide layer covering:
the first source electrode;
the first drain electrode; and
the second gate electrode;
a second semiconductor layer comprising an oxide semiconductor material disposed on the oxide layer, the second semiconductor layer overlapping the second gate electrode; and
a second source electrode and a second drain electrode disposed on the second semiconductor layer,
wherein a gate line is disposed between the gate insulating layer and the intermediate insulating layer, and
wherein a data line and the second gate electrode are disposed between the intermediate insulating layer and the oxide layer.
10. The thin film transistor substrate of claim 9 , wherein:
the first source electrode is connected to one portion of the first semiconductor layer through a source contact hole penetrating the intermediate insulating layer and the gate insulating layer;
the first drain electrode is connected to another portion of the first semiconductor layer through a drain contact hole penetrating the intermediate insulating layer and the gate insulating layer;
the second source electrode contacts one portion of the second semiconductor layer; and
the second drain electrode contacts another portion of the second semiconductor layer.
11. The thin film transistor substrate of claim 10 , wherein the first source electrode and the first drain electrode comprise a same material and are disposed in a same layer as the second gate electrode.
12. The thin film transistor substrate of claim 11 , wherein the second gate electrode is connected to the gate line, which comprises the same material and is disposed in a same layer as the first gate electrode, through a gate contact hole penetrating the intermediate insulating layer.
13. The thin film transistor substrate of claim 11 , wherein the second source electrode is connected to the data line, which comprises the same material and is disposed in a same layer as the second gate electrode, through a data contact hole.
14. The thin film transistor substrate of claim 9 , wherein the intermediate insulating layer further comprises a lower oxide layer.
15. The thin film transistor substrate of claim 14 , wherein the nitride layer is on the lower oxide layer.