Deflecting device for electron beams, magnetic deflecting unit for such a deflecting device, and device for vapor coating a planar substrate using such a deflecting device
A vaporizing device is provided, wherein an elongated pot having material to be vaporized is impinged upon by an electron beam, preferably via several electron guns. Each electron gun is responsible for a certain section of the pot. The electron beam is guided over the melt in a pendular manner. For this purpose, a first magnetic deflecting unit is provided, which produces a variable parallel displacement of the electron beam. In order to achieve this, two magnetic fields are provided, the magnetic field boundaries of which form a type of lens system, wherein the outlet side of the first magnetic field is convex and the inlet side of the second magnetic field is concave. In order to deflect the electron beam into the pot, a second magnetic deflecting unit is provided, the magnetic field of which can be moved synchronously with the beam displacement parallel to the pot.
1. A deflecting device for electron beams for use in an electron beam vaporizer, the deflecting device comprising:
a first magnetic deflecting unit having a central axis, wherein an electron beam entering the first magnetic deflecting unit on the central axis is displaceable parallel to the central axis in a displacement plane via a magnetic field system whose intensity is variable in order to determine a magnitude of the beam displacement;
a second magnetic deflecting unit operatively configured to direct the electron beam exiting the first magnetic deflecting unit out of the displacement plane;
wherein the second magnetic deflecting unit generates a magnetic field running transverse to the central axis, a homogeneous area of the magnetic field being shorter than a maximum displacement to be achieved with the first magnetic deflecting unit, wherein a position of the magnetic field running transverse to the central axis is variable synchronously with the beam displacement.
2. The deflecting unit according to claim 1 , wherein the second magnetic deflecting unit comprises:
a plurality of air core coils disposed on one axis, the plurality of air core coils being controllable independently; and
a magnetic core held displaceably on the one axis.
3. The deflecting device according to claim 2 , wherein the second magnetic deflecting unit further comprises:
a guide tube on which the plurality of air core coils are disposed next to one another; and
wherein the magnetic core has a cylindrical shape with an outer diameter corresponding approximately to an inner diameter of the guide tube.
4. The deflecting device according to claim 3 , wherein the guide tube is a slotted guide tube.
5. The deflecting device according to claim 3 , wherein a magnetic liquid lubrication is provided between the magnetic core and the guide tube.
6. The deflecting device according to claim 1 , wherein the magnetic field system comprises two tandemly disposed and anti-parallel aligned magnetic fields.
7. The deflecting device according to claim 6 , wherein a magnetic field boundary of a first magnetic field runs convexly on an exit side and a magnetic field boundary of a second magnetic field runs concavely on an entry side.