Flexible sensors and related systems for determining forces applied to an object, such as a surgical instrument, and methods for manufacturing same
Methods of manufacturing a flexible force sensor include forming a first sensor part providing a plurality of spaced first electrode plates in an electrically non-conductive material. A second sensor part is also formed and includes a plurality of second electrode plates in an electrically non-conductive material. The second electrode plates are identical to the first electrode plates at least in terms of spacing. The first part is assembled to the second part such that each of the first electrode plates are aligned with and parallel to, yet spaced from, respective ones of the second electrode plates, establishing a plurality of capacitive sensing components. The first electrode plates are movable relative to the corresponding second electrode plates, establishing a variable gap therebetween. The sensor parts can be ring-shaped. The sensor parts can be formed via MEMS techniques, with the non-conductive material being a polymer.
1. A method of manufacturing a flexible force sensor, the method comprising:
forming a first sensor part defining a central longitudinal axis and including a plurality of first electrode plates in a first non-conductive material, an inner rim, and an outer rim, the first electrode plates being circumferentially spaced from one another and located radially between the inner and outer rims relative to the longitudinal axis, wherein the inner and outer rims project axially beyond the first electrode plates in a direction of the longitudinal axis;
forming a second sensor part including a plurality of second electrode plates in a second non-conductive material, the second electrode plates being identical to the first electrode plates in at least shape and circumferential spacing; and
assembling the first sensor part to the second sensor part such that respective ones of the first electrode plates are aligned with and spaced from respective ones of the second electrode plates to establish a plurality of capacitive sensing components;
wherein the step of assembling includes the first sensor part in direct, abutting contact with the second sensor part at the inner and outer rims, including the first sensor part in direct, abutting contact with the second sensor part at a circumferential region of direct interface having a minimum radius that is greater than a maximum radius of the first electrode plates relative to the longitudinal axis;
wherein the respective first electrode plate of each of the capacitive sensing components is movable relative to the corresponding respective second electrode plate to establish a variable gap therebetween;
wherein the first and second sensor parts are ring-shaped, such that upon final assembly, the flexible force sensor defines a central bore.
2. The method of claim 1 , wherein forming a first sensor part includes:
forming a common electrode at an exterior of the first non-conductive material and electrically connected to each of the first electrode plates.
3. The method of claim 1 , wherein forming the second sensor part includes:
forming a plurality of electrically isolated pads at an exterior of the second non-conductive material, respective ones of the pads being electrically connected to respective ones of the second electrode plates.
4. The method of claim 1 , wherein forming the first sensor part includes:
forming a first layer of the first non-conductive material on a substrate such that a surface of the first layer contacts the substrate, the first layer being ring-shaped and defining an outer diameter, an inner diameter, and a plurality of passages;
forming an intermediate second layer of the first non-conductive material on the first layer, the second layer including:
an outer ring segment extending from the outer diameter,
an inner ring segment extending from the inner diameter,
a plurality of central segments circumferentially spaced from one another and each defining first and second circumferential sides, the first circumferential sides facing and radially spaced from the outer ring segment, and the second circumferential sides facing and radially spaced from the inner ring segment;
forming a third layer of the first non-conductive material on the outer ring and inner ring segments of the second layer; and
sputtering a conductive material onto exposed faces of the first, second, and third layers to form a sub-assembly;
wherein the conductive material applied to the central segments defines the first electrode plate;
removing the sub-assembly from the substrate;
sputtering a conductive material onto an exposed face of the first layer.
5. The method of claim 1 , wherein the first non-conductive material is a polymer.
6. A method of manufacturing a flexible force sensor, the method comprising:
forming a first sensor part defining a central longitudinal axis and including a plurality of first electrode plates in a first non-conductive material, an inner rim, and an outer rim, the first electrode plates being circumferentially spaced from one another and located radially between the inner and outer rims relative to the longitudinal axis, wherein the inner and outer rims project axially beyond the first electrode plates in a direction of the longitudinal axis;
forming a second sensor part including a plurality of second electrode plates in a second non-conductive material, the second electrode plates being identical to the first electrode plates in at least shape and circumferential spacing; wherein forming the second sensor part includes forming a plurality of electrically isolated pads at an exterior of the second non-conductive material, respective ones of the pads being electrically connected to respective ones of the second electrode plates; and
assembling the first sensor part to the second sensor part such that respective ones of the first electrode plates are aligned with and spaced from respective ones of the second electrode plates to establish a plurality of capacitive sensing components;
wherein the step of assembling includes the first sensor part in direct, abutting contact with the second sensor part at the inner and outer rims, including the first sensor part in direct, abutting contact with the second sensor part at a circumferential region of direct interface having a minimum radius that is greater than a maximum radius of the first electrode plates relative to the longitudinal axis;
wherein the respective first electrode plate of each of the capacitive sensing components is movable relative to the corresponding respective second electrode plate to establish a variable gap therebetween.
7. The method of claim 6 , wherein the first and second sensor parts are ring-shaped, such that upon final assembly, the flexible force sensor defines a central bore.
8. The method of claim 6 , wherein forming the first sensor part includes:
forming a first layer of the first non-conductive material on a substrate such that a surface of the first layer contacts the substrate, the first layer being ring-shaped and defining an outer diameter, an inner diameter, and a plurality of passages;
forming an intermediate second layer of the first non-conductive material on the first layer, the second layer including:
an outer ring segment extending from the outer diameter,
an inner ring segment extending from the inner diameter,
a plurality of central segments circumferentially spaced from one another and each defining first and second circumferential sides, the first circumferential sides facing and radially spaced from the outer ring segment, and the second circumferential sides facing and radially spaced from the inner ring segment;
forming a third layer of the first non-conductive material on the outer ring and inner ring segments of the second layer; and
sputtering a conductive material onto exposed faces of the first, second, and third layers to form a sub-assembly;
wherein the conductive material applied to the central segments defines the first electrode plate;
removing the sub-assembly from the substrate;
sputtering a conductive material onto an exposed face of the first layer.
9. The method of claim 6 , wherein the first non-conductive material is a polymer.
10. A method of manufacturing a flexible force sensor, the method comprising:
forming a first sensor part defining a central longitudinal axis and including a plurality of first electrode plates in a first non-conductive material, an inner rim, and an outer rim, the first electrode plates being circumferentially spaced from one another and located radially between the inner and outer rims relative to the longitudinal axis, wherein the inner and outer rims project axially beyond the first electrode plates in a direction of the longitudinal axis; wherein the first non-conductive material is a polymer;
forming a second sensor part including a plurality of second electrode plates in a second non-conductive material, the second electrode plates being identical to the first electrode plates in at least shape and circumferential spacing; and
assembling the first sensor part to the second sensor part such that respective ones of the first electrode plates are aligned with and spaced from respective ones of the second electrode plates to establish a plurality of capacitive sensing components;
wherein the step of assembling includes the first sensor part in direct, abutting contact with the second sensor part at the inner and outer rims, including the first sensor part in direct, abutting contact with the second sensor part at a circumferential region of direct interface having a minimum radius that is greater than a maximum radius of the first electrode plates relative to the longitudinal axis;
wherein the respective first electrode plate of each of the capacitive sensing components is movable relative to the corresponding respective second electrode plate to establish a variable gap therebetween.
11. The method of claim 10 , wherein the first and second sensor parts are ring-shaped, such that upon final assembly, the flexible force sensor defines a central bore.
12. The method of claim 10 , wherein forming the second sensor part includes:
forming a plurality of electrically isolated pads at an exterior of the second non-conductive material, respective ones of the pads being electrically connected to respective ones of the second electrode plates.
13. The method of claim 10 , wherein forming the first sensor part includes:
forming a first layer of the first non-conductive material on a substrate such that a surface of the first layer contacts the substrate, the first layer being ring-shaped and defining an outer diameter, an inner diameter, and a plurality of passages;
forming an intermediate second layer of the first non-conductive material on the first layer, the second layer including:
an outer ring segment extending from the outer diameter,
an inner ring segment extending from the inner diameter,
a plurality of central segments circumferentially spaced from one another and each defining first and second circumferential sides, the first circumferential sides facing and radially spaced from the outer ring segment, and the second circumferential sides facing and radially spaced from the inner ring segment;
forming a third layer of the first non-conductive material on the outer ring and inner ring segments of the second layer; and
sputtering a conductive material onto exposed faces of the first, second, and third layers to form a sub-assembly;
wherein the conductive material applied to the central segments defines the first electrode plate;
removing the sub-assembly from the substrate;
sputtering a conductive material onto an exposed face of the first layer.