Method for forming resistance changing element capable of operating at low voltage
A resistance changing element according to the present invention comprises a first electrode ( 101 ) and a second electrode ( 103 ); and an ion conducting layer ( 102 ) that is formed between the first electrode ( 101 ) and the second electrode ( 103 ) and that contains at least oxygen and carbon.
1. A method for forming a resistance changing element, comprising:
forming an insulation film by plasma CVD process with a gas in which a gas of an organic silica compound having a skeleton of at least silicon and oxygen is diluted with an inertia gas; and
forming a second electrode on said insulation film,
wherein the step that forms said insulation film is preceded by forming a valve metal film on the first electrode and forming the insulation film, said step including oxidizing a metal contained in the valve metal film.
2. The method for forming a resistance changing element according to claim 1 ,
wherein said insulation film forming step is performed by forming said insulation film without an oxidation gas.
3. The method for forming a resistance changing element according to claim 1 ,
wherein said organic silica compound is a ring-shaped organic silica compound having a skeleton of silicon and oxygen.
4. The method for forming a resistance changing element according to claim 1 ,
wherein said organic silica compound is a ring-shaped organic silica compound that has a skeleton of silicon and oxygen and whose side ring is bound to at least one unsaturated hydrocarbon group.
5. The method for forming a resistance changing element according to claim 1 ,
wherein said organic silica compound has a structure expressed by any one of Chemical Formulas that follow and R1 and R2 each is any one from among hydrogen, methyl group, ethyl group, propyl group, isopropyl group, and vinyl group
6. The method for forming a resistance changing element according to claim 5 ,
wherein said organic silica compound has a structure expressed by any one of Chemical Formulas that follow
7. The method for forming a resistance changing element according to claim 5 ,
wherein said organic silica compound has a structure expressed by any one of Chemical Formulas that follow
8. The method for forming a resistance changing element according to claim 1 ,
wherein said first electrode is made of copper, said valve metal is made of titanium, and said second electrode is made of ruthenium.
9. The method for forming a resistance changing element according to claim 1 , further comprising:
a step that radiates inertia gas plasma to a front surface of the porous film, said step being performed between the step that forms said insulation film and the step that forms said second electrode.