Semiconductor structure and fabricating method thereof
A semiconductor structure and a method for fabricating the same are provided. The semiconductor structure includes a wafer substrate having a top surface and a bottom surface, and a conductive pillar in the wafer substrate defined by a deep trench insulator through the top surface and the bottom surface of the wafer substrate. The method for fabricating the semiconductor structure includes following steps. A deep trench is formed from a top surface of a wafer substrate to define a conductive region in the wafer substrate. The conductive region is doped with a dopant. The deep trench is filled with an insulation material to form a deep trench insulator. And the wafer substrate is thinned from a bottom surface of the wafer substrate to expose the deep trench insulator and isolate the conductive region to form a conductive pillar.
1. A method for fabricating a semiconductor structure,
the method comprising:
forming a deep trench from a top surface of a wafer substrate to define a conductive region in the wafer substrate;
doping the conductive region with a dopant;
filling the deep trench with an insulation material to form a deep trench insulator; and
thinning the wafer substrate from a bottom surface of the wafer substrate to expose the deep trench insulator and isolate the conductive region to form a conductive pillar.
2. The method of claim 1 , further comprising:
doping the conductive region with the dopant selected from the group consisting of phosphorus, arsenic, boron, aluminum, gallium, and combinations thereof.
3. The method of claim 1 , wherein after forming the deep trench insulator, the method further comprises:
forming a plurality of semiconductor devices on the top surface of the wafer substrate.
4. The method of claim 1 , further comprising:
depositing an top interlayer dielectric layer over the top surface of the wafer substrate; and
forming a plurality of top contact vias in the top interlayer dielectric layer and a top metal layer over the top interlayer dielectric layer, wherein the plurality of top contact vias and the top metal layer are electrically connected to the conductive pillar.
5. The method of claim 4 , further comprising:
depositing an bottom interlayer dielectric layer over the bottom surface of the wafer substrate; and
forming a plurality of bottom contact vias in the bottom interlayer dielectric layer and a bottom metal layer over the bottom interlayer dielectric layer, wherein the plurality of bottom contact vias and the bottom metal layer are electrically connected to the conductive pillar.
6. The method of claim 1 , wherein the wafer substrate is a lightly doped wafer substrate or a heavily doped wafer substrate with an epi layer.
7. The method of claim 2 , wherein doping the conductive region with the dopant comprises diffusion or ion implantation.
8. A method for fabricating a semiconductor structure comprising:
defining a conductive region in a wafer substrate by forming a deep trench from a top surface of the wafer substrate;
forming a deep trench insulator by filling the deep trench with an insulation material;
doping the conductive region with a dopant;
forming a plurality of semiconductor devices on the top surface of the wafer substrate;
depositing a top interlayer dielectric layer all over the top surface of the wafer substrate;
forming a plurality of top contact vias in the top interlayer dielectric layer and a top metal layer over the top interlayer dielectric layer, wherein the plurality of top contact vias and the top metal layer are electrically connected to the conductive region;
thinning the wafer substrate from a bottom surface of the wafer substrate to expose the deep trench insulator and isolate the conductive region to form a conductive pillar;
depositing a bottom interlayer dielectric layer over the bottom surface of the wafer substrate; and
forming a plurality of bottom contact vias in the bottom interlayer dielectric layer and a bottom metal layer over the bottom interlayer dielectric layer, wherein the plurality of bottom contact vias and the bottom metal layer are electrically connected to the conductive pillar.
9. The method of claim 8 , further comprising:
depositing a protection layer over the top metal layer.
10. The method of claim 8 , wherein doping the conductive region with a dopant comprises POCl 3 diffusion or ion implant.
11. The method of claim 1 , wherein filling the deep trench to form the deep trench insulator comprises:
depositing an insulation layer in the deep trench; and
depositing a middle filler layer over the insulation layer.
12. The method of claim 1 , wherein the deep trench insulator has a pattern of a circular ring, a triangular ring, a rectangular ring, or a polygonal ring.
13. The method of claim 1 , wherein thinning the wafer substrate is performed by a grinding process, an etching process, a polishing process, or a combination thereof.
14. The method of claim 3 , wherein forming the semiconductor devices is performed after forming the deep trench insulator.
15. The method of claim 5 , further comprising patterning the top metal layer and the bottom metal layer.
16. The method of claim 8 , wherein forming the deep trench insulator comprises:
depositing an insulation layer in the deep trench; and
depositing a middle filler layer over the insulation layer.
17. The method of claim 8 , wherein the deep trench insulator has a pattern of a circular ring, a triangular ring, a rectangular ring, or a polygonal ring.
18. The method of claim 8 , wherein doping the conductive region is performed during or after forming the semiconductor devices.
19. The method of claim 8 , wherein thinning the wafer substrate is performed by a grinding process, an etching process, a polishing process, or a combination thereof.
20. The method of claim 8 , further comprising patterning the top metal layer and the bottom metal layer.