IGBT with emitter electrode electrically connected with impurity zone
A semiconductor device includes a semiconductor body including a drift zone of a first conductivity type, an emitter region of a second, complementary conductivity type configured to inject charge carriers into the drift zone, and an emitter electrode. The emitter electrode includes a metal silicide layer in direct ohmic contact with the emitter region. A net impurity concentration in a portion of the emitter region directly adjoining the metal silicide layer is at most 1×10 17 cm −3 .
1. A semiconductor device comprising a semiconductor body including:
a drift zone of a first conductivity type;
an emitter region of a second, complementary conductivity type configured to inject charge carriers into the drift zone;
an emitter electrode comprising a metal silicide layer in direct ohmic contact with the emitter region,
wherein a net impurity concentration in a portion of the emitter region directly adjoining the metal silicide layer is at most 1×10 17 cm −3 ; and a contact trench formed within the semiconductor body, wherein the portion of the emitter region directly adjoining the metal silicide layer formed at inner walls of the contact trench.
2. The semiconductor device according to claim 1 , wherein the semiconductor body includes Si at least in a portion of the emitter region directly adjoining the metal silicide layer.
3. The semiconductor device according to claim 1 , wherein the emitter region is p-type and the metal silicide layer includes PtSi or IrSi.
4. The semiconductor device according to claim 1 , wherein the emitter region is n-type and the metal silicide layer includes TiSi.
5. The semiconductor device according to claim 1 , wherein the emitter electrode includes at least one of TiN, TiW, Ta, TaN, AlSiCu, AlCu, and Cu on the metal silicide layer.
6. The semiconductor device according to claim 5 , wherein the emitter electrode comprises a first metal layer in contact with the metal silicide layer including at least one of TiN, TiW, Ta and TaN and a second metal layer on the first metal layer comprising at least one of AlSiCu, AlCu, and Cu.
7. The semiconductor device according to claim 1 , wherein the metal silicide layer selectively lines a bottom wall of the contact trench.
8. The semiconductor device of claim 1 , wherein the trench is completely filled with the emitter electrode.
9. An IGBT, comprising:
a semiconductor body comprising IGBT cells, at least one of the IGBT cells comprising a source zone of a first conductivity type, a body zone of a second, complementary conductivity type, and a drift zone of the first conductivity type separated from the source zone by the body zone;
an emitter electrode comprising a metal silicide layer that directly adjoins at least one of the body zone and a supplementary zone of the second conductivity type, wherein a net impurity concentration in a portion of at least one of the body zone and the supplementary zone directly adjoining the metal silicide layer is at most 1×10 17 cm −3 ; and an insulated gate electrode and a contact trench filled with the emitter electrode extending from a first surface into the semiconductor body.
10. The IGBT according to claim 9 , wherein the emitter electrode further comprises a first metal layer on the metal silicide layer including at least one of TiN, TiW, Ta and TaN and a second metal layer on the first metal layer comprising at least one of AlSiCu, AlCu, and Cu.
11. The IGBT according to claim 9 , wherein the metal silicide layer directly adjoins the source zones and the body zones.
12. The IGBT of claim 9 , wherein the supplementary zone is an anode zone of a diode cell, the anode zone forming a pn junction with the drift zone.
13. The IGBT of claim 9 , wherein the supplementary zone is a termination zone in an edge area surrounding a cell area including the IGBT cells.