Metal-oxide-semiconductor field-effect transistor with metal-insulator semiconductor contact structure to reduce Schottky barrier

1. A method, comprising:

depositing a first metal layer on a native SiO 2 layer that is disposed on at least one of a source and a drain of a metal-oxide-semiconductor field-effect transistor (MOSFET); and

forming a metal oxide layer from the native SiO 2 layer and a part of the first metal layer, wherein the remaining part of the first metal layer, the metal oxide layer, and the at least one of the source and the drain form a metal-insulator-semiconductor (MIS) contact.

2. The method of claim 1 , wherein forming the metal oxide layer results in a raised silicon layer on the at least one of the source and drain below the metal oxide layer.

3. The method of claim 1 , wherein forming a metal oxide layer is performed by a rapid thermal anneal (RTA) process.

4. The method of claim 3 , wherein the RTA process is performed with a peak temperature from 300° C. to 600° C. and a peak time duration from 1 sec to 2 sec.

5. The method of claim 1 , further comprising depositing a second metal layer on the first metal layer.

6. The method of claim 1 , further comprising performing chemical mechanical planarization of the metal layer.

7. The method of claim 1 , further comprising forming contact holes through a dielectric layer disposed over the MOSFET towards the source and the drain.

8. The method of claim 1 , further comprising forming the native SiO 2 layer on the at least one of the source and the drain.

9. The method of claim 1 , wherein the native SiO 2 layer has a thickness ranging from 8 Å to 10 Å.

10. The method of claim 1 , wherein the metal oxide layer has a thickness ranging from 8 Å to 10 Å.

11. A method, comprising:

depositing a first metal layer on a native SiO 2 layer that is disposed on at least one of a source and a drain of a metal-oxide-semiconductor field-effect transistor (MOSFET); and

performing a thermal process to form a metal oxide layer and a raised silicon layer that is disposed on the at least one of the source and drain below the metal oxide layer, from the native SiO 2 layer and a part of the first metal layer, wherein the remaining part of the first metal layer, the metal oxide layer, and the at least one of the source and the drain form a metal-insulator-semiconductor (MIS) contact.

12. The method of claim 11 , wherein the thermal process is performed with a peak temperature from 300° C. to 600° C. and a peak time duration from 1 sec to 2 sec.

13. The method of claim 11 , further comprising depositing a second metal layer on the first metal layer.

14. The method of claim 11 , further comprising performing chemical mechanical planarization on the first metal layer.

15. A method, comprising:

forming a gate structure on a semiconductor substrate;

doping a region of a semiconductor substrate to form a source/drain region in the substrate, the source/drain region being aligned to the gate structure;

depositing a dielectric layer over the gate structure and the source/drain region and patterning the dielectric layer to include an opening exposing the source/drain region;

allowing a native oxide to form on the exposed source/drain region;

lining the opening with a first metal layer;

reacting the source/drain region with the first metal layer to form a raised silicide silicon region on the source/drain region and contemporaneously forming a metal oxide layer lining the opening; and

filling the opening with a second metal layer.

16. The method of claim 15 , wherein the step of reacting the source/drain region with the first metal layer comprises performing a thermal process on the source/drain region and the first metal layer.

17. The method of claim 16 , wherein the thermal process is a rapid thermal anneal having a peak temperature of from about 300° C. to about 600° C. for a duration of from about 1 second to about 2 seconds.

18. The method of claim 15 , wherein the gate structure includes a gate electrode and a gate spacer formed on a sidewall thereof, and wherein the opening in the dielectric layer exposes a part of the spacer.

19. The method of claim 18 , wherein the first metal layer is deposited, in part, on the spacer.

20. The method of claim 15 , wherein the step of lining the opening with a first metal layer includes forming the first metal layer at a first thickness along the bottom of the opening and at a second thickness along sidewalls of the opening, the first thickness being greater than the second thickness.