Method for manufacturing semiconductor device
A method for manufacturing a semiconductor device that comprises two opposite types of MOSFETs formed on one semiconductor substrate, comprising: defining an active region for each of the MOSFETs on the semiconductor substrate; forming an interfacial oxide layer on a surface of the semiconductor substrate; forming a high-K gate dielectric layer on the interfacial oxide layer; forming a metal gate layer on the high-K gate dielectric layer; implanting dopant ions in the metal gate layer; forming a Poly-Si layer on the metal gate layer; patterning the Poly-Si layer, the metal gate layer, the high-K gate dielectric layer and the interfacial oxide layer to form a plurality of gate stack structures; forming a plurality of gate spacer surrounding each of the plurality of gate stack structures; and forming a plurality of S/D regions. During activation annealing for forming the S/D regions, the dopant ions implanted in the metal gate layer diffuse and accumulate at an upper interface of the high-K gate dielectric layer to change the characteristics of the metal gates, and at a lower interface of the high-K gate dielectric layer to form electric dipoles with appropriate polarities by interfacial reaction, so as to realize adjusting of the effective work functions of the metal gates of the opposite types of MOSFETs, respectively.
1. A method for manufacturing a semiconductor device that comprises two opposite types of MOSFETs formed on one semiconductor substrate, comprising:
defining an active region for each of the MOSFETs on the semiconductor substrate;
forming an interfacial oxide layer on a surface of the semiconductor substrate;
forming a high-K gate dielectric layer on the interfacial oxide layer;
forming a metal gate layer on the high-K gate dielectric layer;
implanting dopant ions in the metal gate layer;
forming a metal barrier layer on the metal gate layer between the step of implanting dopant ions and the step of forming a Poly-Si layer, wherein the metal barrier layer is arranged between the metal gate layer and the Poly-Si layer, wherein the metal barrier layer is any one selected from a group consisting of TaN, AlN and TiN;
forming the Poly-Si layer on the metal gate layer;
patterning the Poly-Si layer, the metal gate layer, the high-K gate dielectric layer and the interfacial oxide layer to form a plurality of gate stack structures;
forming a plurality of gate spacers surrounding each of the gate stack structures; and
forming a plurality of S/D regions,
wherein during activation annealing for forming the S/D regions, the dopant ions in the metal gate layer diffuse and accumulate at an upper interface between the high-K gate dielectric layer and the metal gate layer, which change the characteristics of the metal gates, and at a lower interface between the high-K gate dielectric layer and the interfacial oxide layer, electric dipoles are generated by interfacial reaction at the lower interface, so as to realize adjusting of the effective work functions of the metal gates,
wherein the dopant ions are non-metal ions.
2. The method for manufacturing the semiconductor device according to claim 1 , further comprising cleaning the surface of the semiconductor substrate between the step of defining the active region and the step of forming the interfacial oxide layer.
3. The method for manufacturing the semiconductor device according to claim 2 , wherein the cleaning the surface of the semiconductor substrate comprises:
ultrasonic-cleaning the semiconductor substrate in deionized water;
immersing the semiconductor substrate in mixed solution including hydrofluoric acid, isopropanol and water;
washing the semiconductor substrate with the deionized water; and
spin-drying the semiconductor substrate.
4. The method for manufacturing the semiconductor device according to claim 3 , wherein the hydrofluoric acid, isopropanol and water in the mixed solution have a volume ratio of about 0.2-1.5%:0.01-0.10%:1.
5. The method for manufacturing the semiconductor device according to claim 3 , wherein the time for immersing the semiconductor substrate in mixed solution is about 2-10 minutes.
6. The method for manufacturing the semiconductor device according to claim 1 , further comprising post-deposition-annealing of the high-K gate dielectric layer between the step of forming the high-K gate dielectric layer and the step of forming the metal gate layer, so as to improve quality of the high-K dielectric layer.
7. The method for manufacturing the semiconductor device according to claim 1 , wherein the high-K gate dielectric layer comprises any one selected from a group consisting of ZrO 2 , ZrON, ZrSiON, HfZrO, HfZrOn, HfON, HfO 2 , HfAlO, HfAlON, HfSiO, HfSiON, HfLaO, HfLaON, and any combination thereof.
8. The method for manufacturing the semiconductor device according to claim 1 , wherein the high-K gate dielectric layer is formed by atomic layer deposition, physical vapor deposition, or metal organic chemical vapor deposition.
9. The method for manufacturing the semiconductor device according to claim 1 , wherein the high-K gate dielectric layer has a thickness of about 1.5-5 nm.
10. The method for manufacturing the semiconductor device according to claim 1 , wherein the metal gate layer comprises any one selected from a group consisting of TiN, TaN, MoN, WN, TaC, and TaCN.
11. The method for manufacturing the semiconductor device according to claim 1 , wherein the metal gate layer has a thickness of about 2-30 nm.
12. The method for manufacturing the semiconductor device according to claim 1 , wherein in the step of implanting the dopant ions in the metal gate layer, energy and dosage of the ion implantation are controlled so that the implanted dopant ions are only distributed in the metal gate layer, and the energy and the dosage of the ion implantation are also controlled according to a desired threshold voltage.
13. The method for manufacturing the semiconductor device according to claim 12 , wherein the energy of the ion implantation is 0.2 KeV-30 KeV.
14. The method for manufacturing the semiconductor device according to claim 13 , wherein the dosage of the ion implantation is (1E13-1E15) cm −2 .
15. The method for manufacturing the semiconductor device according to claim 1 , wherein the two opposite types of MOSFETs comprise an NMOSFET and a PMOSFET, and wherein the step of implanting the dopant ions in the metal gate layer comprises:
performing ion implantation in the metal gate layer in the active region of the NMOSFET using a first dopant with the active region of the PMOSFET being covered; and
performing ion implantation in the metal gate layer in the active region of the PMOSFET using a second dopant with the active region of the NMOSFET being covered.
16. The method for manufacturing the semiconductor device according to claim 15 , wherein the first dopant is capable of decreasing effective work function.
17. The method for manufacturing the semiconductor device according to claim 16 , wherein the first dopant is any one selected from a group consisting of P, and As.
18. The method for manufacturing the semiconductor device according to claim 15 , wherein the second dopant is capable of increasing effective work function.
19. The method for manufacturing the semiconductor device according to claim 18 , wherein the second dopant is any one selected from a group consisting of B, and BF 2 .
20. The method for manufacturing the semiconductor device according to claim 1 , wherein the activation annealing is performed at a temperature of about 950-1000° C. for about 2 ms-30 s.
21. The method for manufacturing the semiconductor device according to claim 1 , wherein the activation annealing is any one selected from rapid thermal annealing, spike annealing, laser annealing and microwave annealing.