Semiconductor device
A semiconductor substrate of a semiconductor device includes a first conductive body region that is formed in the element region; a second conductive drift region that is formed in the element region; a gate electrode that is formed in the element region, that is arranged in a gate trench, and that faces the body region; an insulating body that is formed in the element region and is arranged between the gate electrode and an inside wall of the gate trench; a first conductive floating region that is formed in the element region and that is surrounded by the drift region; a first voltage-resistance retaining structure that is formed in the peripheral region and that surrounds the element region; and a gate pad that is formed in the peripheral region, and is electrically connected to the gate electrode in a position on the element region-side of the first voltage-resistance retaining structure.
1. A semiconductor device comprising:
a semiconductor substrate that is divided into at least an element region and a peripheral region that surrounds the element region, the semiconductor substrate including
(i) a first conductive type body region that is formed in the element region and is arranged in an area facing an upper surface of the semiconductor substrate;
(ii) a second conductive type drift region that is formed in the element region and contacts a lower surface of the first conductive type body region;
(iii) a gate electrode that is formed in the element region, and that is arranged in a gate trench that passes through the first conductive type body region and extends to the second conductive type drift region, and that faces the first conductive type body region;
(iv) an insulating body that is formed in the element region and is arranged between the gate electrode and an inside wall of the gate trench;
(v) a first conductive type floating region that is formed in the element region, and that surrounds a bottom portion of the gate trench, and that is surrounded by the second conductive type drift region;
(vi) a first voltage-resistance retaining structure that is formed in the peripheral region and that surrounds the element region, the first voltage-resistance retaining structure has a first termination trench that extends in a thickness direction of the semiconductor substrate from a front surface of the semiconductor substrate;
(vii) a second voltage-resistance retaining structure formed in the peripheral region, the second voltage-resistance retaining structure surrounds the gate electrode, the second voltage-resistance retaining structure is surrounded by the first voltage-resistance retaining structure, the second voltage-resistance retaining structure has a second termination trench that extends in the thickness direction of the semiconductor substrate from the front surface of the semiconductor substrate; and
(viii) a gate pad that is formed in the peripheral region, and the gate pad is electrically connected to the gate electrode in a position on an element region-side of the first voltage-resistance retaining structure, on a front surface side of the semiconductor substrate, the gate pad is only surrounded by the first voltage-resistance retaining structure from among the first voltage-resistance retaining structure and the second voltage-resistance retaining structure.
2. The semiconductor device according to claim 1 , wherein
the second voltage-resistance retaining structure is formed surrounding the element region, on the element region-side of the first voltage-resistance retaining structure; and
the gate pad is arranged in a position on a first voltage-resistance retaining structure-side of a boundary on the element region-side of the second voltage-resistance retaining structure, on the front surface side of the semiconductor substrate.
3. The semiconductor device according to claim 1 , wherein
the peripheral region includes the first conductive type body region, and the second conductive type drift region;
the first termination trench and the second termination trench passes through the first conductive type body region and extends to the second conductive type drift region; and
a first conductive type floating region surrounds a bottom portion of at least one of the first termination trench and the second termination trench, the first conductive type floating region is surrounded by the second conductive type drift region, the first conductive type floating region is also formed in the peripheral region.
4. The semiconductor device according to claim 1 , wherein the semiconductor substrate is made of SiC.
5. The semiconductor device according to claim 1 , further comprising an insulating layer formed between the gate pad and the first conductive type body region.