Integrated photoemission sources and scalable photoemission structures
View Patent ↗A scalable, integrated photoemitter device and method of manufacture using conventional CMOS manufacturing techniques. The photoemitter device has a first semiconductor substrate having a plurality of photonic sources formed on top in a first material layer, the plurality of photonic sources and the material layer forming a planar surface. A second substrate is bonded to the planar surface, the second substrate having a plurality of photoemitter structures formed on top in a second material layer, each photoemitter structure in alignment with a respective photonic source of the first substrate and configured to generate particle beams responsive to light from a respective light source. Additionally provided is a multi-level photoemitter of tapered design for implementation in the scalable, integrated photoemitter device. Conventional CMOS manufacturing techniques are also implemented to build the multi-level photoemitter of tapered design.
1. A scalable, integrated photoemitter device comprising:
a first semiconductor substrate having a plurality of photonic sources formed on top in a first material layer, said plurality of photonic sources and said material layer forming a planar surface;
a second substrate bonded to said planar surface, said second substrate having a plurality of photoemitter structures formed on top in a second material layer, each photoemitter structure in alignment with a respective photonic source of said first substrate and configured to generate particle beams responsive to light from a respective light source.
2. The scalable, integrated photoemitter device of claim 1 , wherein the first material layer comprises an opaque material.
3. The scalable, integrated photoemitter device of wherein the second substrate and said second material layer comprise a translucent or transparent material.
4. The scalable, integrated photoemitter device of claim 1 , wherein said first material layer and said second substrate and second material layer comprise Quartz.
5. The scalable, integrated photoemitter device of claim 1 , wherein said plurality of photonic sources comprise a light emitting diode light source or UV laser diode light source.
6. The scalable, integrated photoemitter device of claim 1 , wherein said photoemitter structures comprise a photoemissive material formed of a metal, semiconductor material, or semimetal or metal nanoparticle materials dimensioned to receive a light from a corresponding photonic source.
7. The scalable, integrated photoemitter device of claim 1 , further comprising: a drive circuit associated with each photonic source of said plurality of photonic sources, each drive circuit connected to a corresponding photonic source and configured to provide signals for actuating that photonic source.
8. A method of forming a scalable, integrated photoemitter device comprising:
forming a plurality of photonic sources on top of a first semiconductor substrate;
providing a first material in spaces between said plurality formed plurality of photonic sources to form a first material layer on top said first substrate,
planarizing said first material layer to form a planar surface;
forming a layer of a second material on a surface of a second substrate;
forming a plurality of photoemitter structures within said second material layer;
bonding said second substrate having formed plurality of photoemitter structures to said planar surface of said first material layer, wherein each of said plurality of photoemitter structures is automatic located in alignment with a corresponding photonic source of said first substrate.
9. The method of claim 8 , wherein the first material layer comprises an opaque material.
10. The method of claim 8 , wherein said plurality of photonic sources comprises a light emitting diode light source or UV laser diode light source.
11. The method of claim 8 , wherein said photoemitter structures comprise a photoemissive material formed of a metal, semiconductor material, or semimetal or metal nanoparticle materials.
12. The method of claim 8 , wherein the second substrate and said second material layer comprise a translucent or transparent material.
13. The method of claim 8 , further comprising:
forming in said first substrate, a drive circuit associated with each photonic source of said plurality of photonic sources, each drive circuit configured to provide signals for actuating a respective photonic source.