Micromachined monolithic 6-axis inertial sensor

1. A 6-degrees-of-freedom (6-DOF) inertial measurement system, comprising:

a device layer including a single proof-mass 6-axis inertial sensor formed in an x-y plane, the single proof-mass 6-axis inertial sensor including:

a main proof-mass section suspended about a single, central anchor, the main proof-mass section including a radial portion extending outward towards an edge of the 6-axis inertial sensor;

a pair of x-axis proof-mass sections coupled to the main proof-mass section using multi-function flexure bearings and coupled to each other using an anti-phase flexure bearing;

a central suspension system configured to suspend the 6-axis inertial sensor from the single, central anchor; and

a drive electrode including a moving portion and a stationary portion, the moving portion coupled to the radial portion, wherein the drive electrode and the central suspension system are configured to oscillate the 6-axis inertial sensor about a z-axis normal to the x-y plane at a drive frequency;

a cap wafer bonded to a first surface of the device layer; and

a via wafer bonded to a second surface of the device layer, wherein the cap wafer and the via wafer are configured to encapsulate the single proof-mass 6-axis inertial sensor.

2. The system of claim 1 , wherein the multi-function flexure bearings are configured to allow the first and second x-axis proof-mass sections to move in-phase or anti-phase along an x-axis of the x-y plane.

3. The system of claim 2 , wherein the multi-function flexure bearings are configured to allow the first and second x-axis proof-mass sections to move in-phase along the x-axis in response to an x-axis acceleration.

4. The system of claim 2 , wherein the multi-function flexure bearings are configured to allow the first and second x-axis proof-mass sections to move anti-phase along the x-axis in response to a z-axis rotation.

5. The system of claim 1 , wherein the multi-function flexure bearings are configured to allow each of the first and second x-axis proof-mass sections to rotate about a y-axis of the x-y plane in response to a z-axis acceleration.

6. The system of claim 1 , wherein at least one of the multi-function flexure bearings is elongate, extending between the main proof-mass section and the first x-axis proof-mass section along a y-axis of the x-y plane.

7. The system of claim 6 , wherein the at least one multi-function flexure bearing is configured to be flexed under torsion about an axis parallel to the y-axis.

8. The system of claim 7 , wherein four multi-function flexure bearings couple the single proof-mass to the first and second x-axis proof-mass sections, wherein for each multi-function flexure bearing there is an opposing multi-function bearing mirrored about an x-z plane, and another multi-function bearing mirrored about an y-z plane.

9. The system of claim 1 , wherein the anti-phase flexure bearing that is elongate extending along a y-axis of the x-y plane.

10. The system of claim 9 , wherein two anti-phase flexure bearings couple the first x-axis proof-mass section to the second x-axis proof-mass section on opposing sides of an x-z plane.

11. The system of claim 10 , wherein each of the two anti-phase flexure bearings zigzag as they extend along an x-axis between the first and second x-axis proof-mass sections.

12. The system of claim 1 , wherein the single proof-mass inertial sensor is quadrilateral in shape, wherein the single, central anchor is centered in the quadrilateral, and wherein the main proof-mass section includes four radial portions extending outward towards the four corners of the 6-axis inertial sensor.

13. The system of claim 1 , wherein the drive electrode includes a plurality of moving fingers interdigitated with a plurality of stationary fingers, and wherein the stationary fingers are anchored to the via wafer.

14. The system of claim 1 , including:

first electrodes in-plane with the device layer and configured to detect z-axis angular rotation, x-axis acceleration, and y-axis acceleration; and

second electrodes out-of-plane with the device layer and configured to detect z-axis acceleration, x-axis angular rotation, and y-axis angular rotation.

15. A single proof-mass, micromachined, monolithic, 6-axis inertial sensor apparatus, comprising:

a main proof-mass section forming an x-y plane suspended about a single, central anchor, the main proof-mass section including radial portions extending outward towards an edge of the 6-axis inertial sensor;

a pair of x-axis proof-mass sections coupled to the main proof-mass section using multi-function flexure bearings and coupled to each other using an anti-phase flexure bearing;

a pair of y-axis proof-mass sections coupled to multiple radial portions of the main proof-mass section using elongated flexure bearings;

a central suspension system configured to suspend the 6-axis inertial sensor from the single, central anchor; and

a drive electrode including a moving portion and a stationary portion, the moving portion coupled to the radial portions, wherein the drive electrode and the central suspension system are configured to oscillate the 6-axis inertial sensor about a z-axis normal to the x-y plane at a drive frequency.

16. The apparatus of claim 15 , wherein the multi-function flexure bearings are configured to allow the pair of x-axis proof-mass sections to move in-phase or anti-phase along an x-axis of the x-y plane.

17. The apparatus of claim 16 , wherein the multi-function flexure bearings are configured to allow the pair of x-axis proof-mass sections to move in-phase along the x-axis in response to an x-axis acceleration, and anti-phase along the x-axis in response to a z-axis rotation.

18. The apparatus of claim 15 , wherein the multi-function flexure bearings are configured to allow each of the pair of x-axis proof-mass sections to rotate about a y-axis of the x-y plane in response to a z-axis acceleration.

19. A method, comprising:

suspending a single proof-mass of a 6-axis inertial sensor about a single, central anchor coupled to a stationary layer using a central suspension, the single proof-mass including a main proof-mass section including a radial portion extending outward towards an edge of the 6-axis inertial sensor;

suspending first and second x-axis proof-mass sections from the main proof-mass section using multi-function flexure bearings;

coupling the first and second x-axis proof-mass sections to each other using an anti-phase flexure bearing;

anchoring a stationary drive electrode to the stationary layer;

coupling a moveable electrode to the stationary electrode; and

oscillating the single proof-mass at a drive frequency using the stationary drive electrode, the moveable electrode, and the central suspension.

20. The method of claim 19 , wherein the multi-function flexure bearings are configured to allow the first and second x-axis proof-mass sections to move in-phase along the x-axis in response to an x-axis acceleration, anti-phase along the x-axis in response to a z-axis rotation, and to rotate about the y-axis in response to a z-axis acceleration.