Method of manufacturing capacitor and display apparatus including the same
Provided is a method of manufacturing a capacitor of a display apparatus, the display apparatus being formed on a substrate and including a thin film transistor, which includes an active layer, a gate electrode, and source and drain electrodes, a display device connected to the thin film transistor, and the capacitor, the method including: forming an electrode layer on the substrate; forming a passivation layer on the electrode layer; patterning the passivation layer to form a first pattern including first branch patterns parallel to each other, and a second pattern including second branch patterns parallel to each other and interposed between the first branch patterns; and forming first and second electrodes by etching the electrode layer using the first and second patterns as masks.
1. A method of manufacturing a capacitor of a display apparatus, the display apparatus being on a substrate and comprising a thin film transistor, which comprises an active layer, a gate electrode, a source electrode, and a drain electrode, a display device electrically connected to the thin film transistor, and the capacitor, the method comprising:
forming an electrode layer on the substrate;
forming a passivation layer on the electrode layer;
forming a photo-resist on a partial area of the passivation layer corresponding to a first pattern and a second pattern;
patterning the passivation layer to form the first pattern comprising first branch patterns parallel to each other and to form the second pattern comprising second branch patterns parallel to each other and respectively interposed between the first branch patterns; and
forming a first electrode and a second electrode of the capacitor by etching the electrode layer using the first pattern and the second pattern as masks.
2. The method of claim 1 , wherein the partial area of the passivation layer where the photo-resist is formed corresponds to any one of the active layer, the gate electrode, or the source electrode and the drain electrode of the thin film transistor.
3. The method of claim 1 , wherein the forming of the first electrode and the second electrode comprises:
forming any one of the active layer, the gate electrode, or the source electrode and the drain electrode by etching the electrode layer using the photo-resist as a mask; and
forming the first electrode and the second electrode by etching the electrode layer using the first pattern and the second pattern as masks.
4. The method of claim 1 , wherein the etching of the electrode layer comprises:
forming the first electrode comprising a plurality of first branch electrodes parallel to each other by etching the electrode layer using the first pattern as a mask; and
forming the second electrode comprising a plurality of second branch electrodes parallel to each other by etching the electrode layer using the second pattern as a mask.
5. The method of claim 4 , wherein the forming of the first electrode and the forming of the second electrode are performed in a same process.
6. The method of claim 4 , wherein the first branch electrodes interdigitate with the second branch electrodes.
7. The method of claim 6 , wherein the first electrode and the second electrode are spaced apart from each other.
8. The method of claim 7 , further comprising forming an insulating layer in a gap between the first electrode and the second electrode.
9. The method of claim 1 , wherein the first pattern of the passivation layer is on the first electrode, and the second pattern of the passivation layer is on the second electrode.
10. The method of claim 1 , wherein the etching of the electrode layer is performed via a dry etching method.
11. The method of claim 1 , wherein the patterning of the passivation layer comprises:
forming a polymer layer on the passivation layer;
patterning the polymer layer; and
forming the first pattern and the second pattern by etching the passivation layer using the patterned polymer layer as a mask.
12. A method of manufacturing a capacitor of a display apparatus, the display apparatus being on a substrate and comprising a thin film transistor, which comprises an active layer, a gate electrode, a source electrode, and a drain electrode, a display device electrically connected to the thin film transistor, and the capacitor, the method comprising:
forming an electrode layer on the substrate;
forming a passivation layer on the electrode layer;
patterning the passivation layer to form a first pattern comprising first branch patterns parallel to each other and to form a second pattern comprising second branch patterns parallel to each other and respectively interposed between the first branch patterns; and
forming a first electrode and a second electrode of the capacitor by etching the electrode layer using the first pattern and the second pattern as masks,
wherein the patterning of the passivation layer comprises:
forming a polymer layer on the passivation layer;
patterning the polymer layer; and
forming the first pattern and the second pattern by etching the passivation layer using the patterned polymer layer as a mask, and
wherein the patterning of the polymer layer comprises:
pressurizing and hardening the polymer layer by using a pressurization member comprising a convex pattern protruding toward the polymer layer and a concave pattern recessed due to the convex pattern; and
forming a fine pattern in the polymer layer by removing a residual polymer layer that remained at a location corresponding to the convex pattern of the pressurization member.
13. The method of claim 12 , wherein the forming of the fine pattern comprises removing the residual polymer layer by using plasma.
14. The method of claim 11 , wherein the forming of the first pattern and the second pattern by etching the passivation layer is performed via a dry etching method.
15. The method of claim 1 , wherein the electrode layer is formed of a same material as any one of materials that the active layer, the gate electrode, or the source electrode and the drain electrode are formed of.
16. A method of manufacturing a capacitor of a display apparatus, the display apparatus being on a substrate and comprising a thin film transistor, which comprises an active layer, a gate electrode, and a source electrode and a drain electrode, a display device electrically connected to the thin film transistor, and the capacitor, the method comprising:
forming an electrode layer on the substrate;
forming a passivation layer on the electrode layer;
patterning the passivation layer to form a first pattern comprising first branch patterns parallel to each other, and a second pattern comprising second branch patterns parallel to each other and interspersed with the first branch patterns;
forming a photo-resist on a partial area of the passivation layer comprising the first pattern and the second pattern; and
forming a first electrode and a second electrode of a same material and in a same layer as any one of the active layer, the gate electrode, or the source electrode and the drain electrode by etching the electrode layer using the photo-resist and the first pattern and the second pattern as masks.