IP Library › Granted Patent US 9,303,207
Granted Patent B2
US 9,303,207 · App. 14/295,262 · Granted Apr 5, 2016

Texturing of monocrystalline semiconductor substrates to reduce incident light reflectance

Inventors: Michael P. Toben (Smithtown, NY); Robert K. Barr (Shrewsbury, MA); Corey O'Connor (Oakham, MA)
C09K13/06A01N35/08A01N43/28C07D275/04C09K13/00C09K13/02C23C18/38C23C18/40G02B1/111H01L31/02363Y02E10/50
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Quick Facts
Patent No.
US 9,303,207
App. No.
14/295,262
Granted
Apr 5, 2016
Kind
B2
Abstract

Monocrystalline semiconductor substrates are textured with alkaline solutions to form pyramid structures on their surfaces to reduce incident light reflectance and improve light absorption of the wafers. The alkaline baths include hydantoin compounds and derivatives thereof in combination with alkoxylated glycols to inhibit the formation of flat areas between pyramid structures to improve the light absorption.

Claims (2)

1. A texturing composition consisting of one or more compounds chosen from hydantoin and hydantoin derivatives, one or more alkoxylated glycols and one or more alkaline compounds selected from the group consisting of potassium hydroxide, sodium hydroxide, lithium hydroxide, quaternary ammonium hydroxides, ammonium hydroxide and alkanolamines, and one or more organic solvents having a flash point of 75° C. or greater, water and optionally one or more oxygen scavengers.

2. The composition of claim 1 , wherein the one or more of hydantoin and hydantoin derivatives range from 0.001 wt % to 1 wt % of the composition.

Assignments (2)
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Feb 11, 2016
From: ROHM AND HAAS ELECTRONIC MATERIALS LLC
To: SUN CHEMICAL CORPORATION
Reel/Frame 037709/0194 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Jan 26, 2016
From: TOBEN, MICHAEL P.; BARR, ROBERT K.; O'CONNER, COREY
To: ROHM AND HAAS ELECTRONIC MATERIALS LLC
Reel/Frame 037586/0428 →
Continuity (2)
Division 13597244 · Aug 28, 2012
Related Publication 20140284529A1 · Sep 25, 2014