IP Library › Granted Patent US 9,343,442
Granted Patent B2
US 9,343,442 · App. 13/623,441 · Granted May 17, 2016

Passive devices in package-on-package structures and methods for forming the same

Inventors: Chih-Hua Chen (Jhubei, TW); Chen-Shien Chen (Zhubei, TW)
Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
H01L25/16H01L21/6835H01L23/49816H01L23/49822H01L23/49827H01L23/5389H01L23/645H01L25/105H01L21/568H01L23/3128H01L2224/03002H01L2224/0401H01L2224/04105H01L2224/06181H01L2224/11002H01L2224/12105H01L2224/131H01L2224/14181H01L2224/16238H01L2224/73204H01L2224/73267H01L2225/1035H01L2225/1041H01L2225/1058H01L2924/15311H01L2924/18162H01L2924/19042H01L2924/19104Y10T29/4913Y10T29/4916Y10T29/49144
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Quick Facts
Patent No.
US 9,343,442
App. No.
13/623,441
Granted
May 17, 2016
Kind
B2
Abstract

A device includes a polymer. A device die is disposed in the polymer. A passive device includes three Through Assembly Vias (TAVs) penetrating through the polymer, wherein the TAVs are coupled in series. A Redistribution Line (RDL) is underlying the polymer. The RDL electrically couples a first one of the TAVs to a second one of the TAVs.

Claims (40)

1. A device comprising:

a polymer;

a device die in the polymer; and

a passive device comprising:

three Through Assembly Vias (TAVs) penetrating through the polymer, wherein the three TAVs are coupled in series; and

a first Redistribution Line (RDL) underlying the polymer, wherein the first RDL electrically couples a first one of the three TAVs to a second one of the three TAVs.

2. The device of claim 1 , wherein the three TAVs comprise:

top ends level with a top surface of the polymer; and

bottom ends level with ends of metal posts of the device die.

3. The device of claim 1 , wherein the polymer comprises a molding compound.

4. The device of claim 1 , wherein the passive device further comprises a second RDL over the polymer, wherein the second RDL electrically couples the second one of the three TAVs to a third one of the three TAVs.

5. The device of claim 1 , wherein the passive device further comprises three solder regions, each being overlying and electrically coupled to one of the three TAVs, and wherein the three solder regions and the three TAVs are coupled in series.

6. The device of claim 1 , wherein the passive device comprises a coil, and wherein an axis of the coil is parallel to a back surface of the device die.

7. The device of claim 6 , wherein the passive device further comprises a paramagnetic line parallel to the axis of the coil, and wherein the paramagnetic line comprises a paramagnetic material.

8. The device of claim 1 , wherein the passive device comprises an inductor.

9. A device comprising:

a device die comprising a plurality of metal features at a first surface of the device die;

a molding compound with the device die molded therein, wherein the molding compound comprises:

a top surface level with a second surface of the device die; and

a bottom surface level with ends of the plurality of metal features; and

a passive device comprising a coil, wherein the coil comprises:

a plurality of Through Assembly Vias (TAVs) penetrating through the molding compound; and

a first plurality of Redistribution Lines (RDLs) underlying the molding compound, wherein the first plurality of RDLs is electrically coupled in series with each other, and wherein the plurality of TAVs is electrically coupled in series with each other, and the plurality of TAVs is serially electrically coupled to the plurality of RDLs.

10. The device of claim 9 , wherein the plurality of TAVs comprises:

first ends level with the top surface of the molding compound; and

second ends level with the bottom surface of the molding compound.

11. The device of claim 9 , wherein the passive device further comprises a second plurality of RDLs over the molding compound, and wherein the second plurality of RDLs electrically inter-couples the second plurality of TAVs.

12. The device of claim 9 , wherein the first plurality of RDLs is underlying an entirety of the molding compound.

13. The device of claim 9 , wherein the passive device further comprises a plurality of solder regions, wherein each of the plurality of solder regions is over and electrically coupled to one of the plurality of TAVs, and wherein the plurality of solder regions is coupled in series, and the plurality of TAVs is electrically coupled in series with the plurality of solder regions.

14. The device of claim 9 , wherein an axis of the coil is parallel to a major surface of the device die.

15. The device of claim 14 , wherein the passive device further comprises a paramagnetic line parallel to the axis of the coil, and wherein the paramagnetic line comprises a paramagnetic material.

16. A device comprising:

a molding compound;

a plurality of Through Assembly Vias (TAVs) penetrating through the molding compound;

a first plurality of redistribution lines on a first side of the molding compound; and

a second plurality of redistribution lines on a second side of the molding compound opposite the first side, wherein the plurality of TAVs is electrically coupled in series with each other, the first plurality of redistribution lines is electrically coupled in series with each other, and the second plurality of redistribution lines is connected in series with each other to form a passive device.

17. The device of claim 16 , wherein the passive device comprises a coil.

18. The device of claim 17 further comprising an additional redistribution line penetrating through the coil, with the coil wrapping around the additional redistribution line.

19. The device of claim 18 , wherein the plurality of TAVs is distributed on opposite sides of the additional redistribution line.

20. The device of claim 16 further comprising a plurality of solder regions electrically coupled in series with each other, and the plurality of solder regions is electrically coupled in series to the plurality of TAVs, the first plurality of redistribution lines, and the second plurality of redistribution lines to form the passive device.

Assignments (1)
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Dec 13, 2013
From: CHEN, CHIH-HUA; CHEN, CHEN-SHIEN
To: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
Reel/Frame 031779/0179 →
Continuity (1)
Related Publication 20140076617A1 · Mar 20, 2014