Nanofluidic channels with gradual depth change for reducing entropic barrier of biopolymers
A device for passing a biopolymer molecule includes a nanochannel formed between a surface relief structure, a patterned layer forming sidewalls of the nanochannel and a sealing layer formed over the patterned layer to encapsulate the nanochannel. The surface relief structure includes a three-dimensionally rounded surface that reduces a channel dimension of the nanochannel at a portion of nanochannel and gradually increases the dimension along the nanochannel toward an opening position, which is configured to receive a biopolymer.
1. A device for passing a biopolymer molecule, comprising:
a nanochannel formed between a surface relief structure, a patterned layer forming sidewalls of the nanochannel and a sealing layer formed over the patterned layer to encapsulate the nanochannel;
wherein the surface relief structure is formed over a substrate and a dielectric layer is disposed between the substrate and the surface relief structure, and the surface relief structure includes a three-dimensionally rounded surface that reduces a channel dimension of the nanochannel at a portion of nanochannel and a height that gradually increases from a deep channel region to a shallow channel region along the direction of the channel, where the channel is configured to receive a biopolymer.
2. The device as recited in claim 1 , wherein the surface relief structure includes a reflowed patterned material to form the three-dimensionally rounded surface.
3. The device as recited in claim 2 , wherein the surface relief structure includes a channel depth profile controlled by tuning one of: a cap height of the surface relief structure, a contact angle with a substrate on which the surface relief structure is formed and a coverage area of the reflowed patterned material.
4. The device as recited in claim 1 , further comprising a conformal dielectric layer formed on the surface relief structure.
5. The device as recited in claim 4 , wherein the conformal dielectric layer formed on the surface relief structure provides at least one of: an etch stop layer during channel patterning of the patterned layer; a harder surface for the surface relief structure and an insulator to insulate the surface relief structure from fluid in the nanochannel.
6. The device as recited in claim 1 , wherein the channel includes a nanochannel configured to gradually stretch biopolymers entering the nanochannel with a reduced entropic energy barrier.
7. The device as recited in claim 1 , further comprising electrodes disposed on opposite sides of the channel to control and/or sense the biopolymer in the channel.
8. The device as recited in claim 7 wherein the electrodes are coated with a layer of linker molecules.
9. The device as recited in claim 7 , wherein the surface relief structure forms at least one of the electrodes.
10. A device for passing a biopolymer molecule, comprising:
a substrate;
a surface relief structure formed on the substrate and having at least one three-dimensionally rounded surface, wherein the surface relief structure forms a first surface of a channel that provides a gradually changing channel depth from a deep channel region to a shallow channel region along the direction of the channel;
a dielectric layer disposed between the substrate and the surface relief structure;
a patterned layer formed on the surface relief structure and forming sidewalls of the channel; and
a sealing layer formed over the patterned layer to form a second surface of the channel opposite the first surface.
11. The device as recited in claim 10 , wherein the surface relief structure includes a reflowed patterned material to form the at least one three-dimensionally rounded surface.
12. The device as recited in claim 11 , wherein the surface relief structure includes a channel depth profile controlled by tuning one of a cap height, a contact angle with the substrate and a coverage area of the reflowed patterned material.
13. The device as recited in claim 10 , further comprising a conformal dielectric layer formed on the surface relief structure to provide at least one of: an etching stop layer during channel patterning of the patterned layer; a harder surface for the surface relief structure and an insulator to insulate the surface relief structure from fluid in the channel.
14. The device as recited in claim 10 , further comprising electrodes disposed on opposite sides of the channel to control and/or sense a biopolymer in the channel.
15. The device as recited in claim 14 , wherein the surface relief structure forms at least one of the electrodes.
16. A device for translocating a biopolymer molecule, which comprises:
a substrate comprising a substrate material; and
a surface relief material on the substrate, wherein the surface relief material has a melting or glass-transition temperature that allows the surface relief material to be ref owed on the substrate, and wherein the surface relief material is configured to have a three-dimensionally rounded surface with a radius of curvature determined by a contact angle of the surface relief material on the substrate and a volume of surface relief material.
17. The device of claim 16 , which further comprises a dielectric layer between the substrate and the surface relief material, wherein the material of the dielectric layer determines the contact angle of the surface relief material.
18. The device of claim 16 , which further comprises an insulating dielectric layer on the surface relief material, and a nanochannel formed in the insulating dielectric layer, wherein the three-dimensionally rounded surface of the surface relief material defines at least a portion of a surface of the nanochannel, and wherein the three-dimensionally rounded surface is configured to minimize an entropic energy barrier for the translocation of the biopolymers.