Heater block and a substrate treatment apparatus

1. A heater block for a substrate treatment apparatus, the heater block comprising:

heating lamps positioned to transfer heat from one side of the heater block to a target subjected to heat treatment,

wherein the heating lamps have different arrangement patterns in a plurality of regions on said one side,

wherein the plurality of regions are divided into a central region at an innermost portion of said one side of the heater block and a peripheral region external to the central region,

wherein the heating lamps include circular shaped heating lamps and T-shaped heating lamps,

wherein the circular shaped heating lamps are disposed on the central region and the T-shaped heating lamps heating lamps are disposed on the peripheral region;

wherein the peripheral region is divided into a plurality of regions along a distance from a central point; and

wherein the heating lamps disposed on the peripheral region have a combined arrangement of at least two or more arrangements among a concentric arrangement, a tessellated arrangement, and a linear arrangement.

2. The heater block of claim 1 wherein the plurality of regions are divided along a distance from a central point of said one side of the heater block.

3. The heater block of claim 1 wherein the heating lamps have a honeycomb arrangement in the central region.

4. The heater block of claim 1 wherein a boundary of the central region is placed at a point within one half of an outermost boundary of said one side.

5. The heater block of claim 1 wherein the number of the heating lamps placed in the central region is less than or equal to the number of heating lamps placed in the peripheral region, resulting in a dense arrangement in the central region.

6. A substrate treatment apparatus comprising:

a processing chamber having a space for heat treatment on a substrate; and

a heater block comprising:

heating lamps generating heat energy,

wherein the heating lamps have different arrangement patterns in a plurality of regions on one side of the heater block; and

a quartz window to maintain a sealing between the processing chamber and a heating housing and to pass through heat energy reflected by the heating housing to transfer it to the substrate,

wherein the plurality of regions are divided into a central region at an innermost portion of said one side of the heater block and a peripheral region external to the central region; and

wherein the heating lamps include circular shaped heating lamps and T-shaped heating lamps, the circular shaped heating lamps are disposed on the central region and the T-shaped heating lamps heating lamps are disposed on the peripheral region;

wherein the peripheral region is divided into a plurality of regions along a distance from a central point; and

wherein the heating lamps disposed on the peripheral region have a combined arrangement of at least two or more arrangements among a concentric arrangement, a tessellated arrangement, and a linear arrangement.

7. The substrate treatment apparatus of claim 6 wherein the plurality of regions are divided along a distance from a central point of said one side of the heater block.

8. The substrate treatment apparatus of claim 6 wherein the heating lamps have a honeycomb arrangement in the central region.

9. The substrate treatment apparatus of claim 6 wherein a boundary of the central region is placed at a point within one half of an outermost boundary of said one side.

10. The heater block of claim 1 , wherein a diameter of the circular shaped heating lamps is smaller than a length of the T-shaped heating lamps.

11. The substrate treatment apparatus of claim 6 , wherein a diameter of the circular heating lamps is smaller than a length of the T-shaped heating lamps.

12. A heater block for a substrate treatment comprising:

a plurality of first heating lamps mounted on a central region of a surface of the heater block;

a plurality of second heating lamps mounted on a peripheral region of the surface of the heater block;

wherein the peripheral region is external to the central region;

wherein the plurality of first heating lamps have a shape different from that of the second heating lamps; and

wherein the plurality of first heating lamps are arranged in a pattern different from that of the plurality of second heating lamps;

wherein the peripheral region is divided into a plurality of regions along a distance from a central point; and

wherein the plurality of second heating lamps have a combined arrangement, in the divided regions, of at least two or more arrangements among a concentric arrangement, a tessellated arrangement, and a linear arrangement.

13. A heater block of claim 12 , wherein the first heating lamps have a circular shape and the second heating lamps have a rectangular shape in a plan view.

14. A heater block of claim 12 , wherein a diameter of the first heating lamps is less than a length of the second heating lamps.