Semiconductor device and method of manufacturing the same
A semiconductor device including an active cell region formed over the surface of a silicon substrate and including a vertical MOSFET, a drain electrode formed over the surface of the silicon substrate and leading out the drain of the vertical MOSFET from the back surface of the silicon substrate, an external drain terminal formed over the drain electrode, and a source electrode formed over the active cell region so as to be opposed to the drain electrode at least along three sides at the periphery of the external drain terminal over the active cell region and connected to the source of the vertical MOSFET.
1. A semiconductor device comprising:
an active cell region formed over a surface of a semiconductor substrate and including a vertical transistor;
an external gate terminal formed over the surface of the semiconductor substrate and electrical connected to a gate of the vertical transistor;
a drain electrode formed over the surface of the semiconductor substrate and leading out a drain of the vertical transistor from a back surface of the semiconductor substrate;
a plurality of external drain terminals formed over the drain electrode and electrically connected to the drain electrode;
a source electrode formed over the active cell region so as to be opposed to the drain electrode at least along three side at a periphery of the external drain terminal and connected to a source of the vertical transistor; and
a plurality of external source terminals formed over the source electrode and electrically connected to the source electrode,
wherein the external drain terminals, the external source terminals and the external gate terminal are disposed at least in a pad layout of two rows×three columns.
2. The semiconductor device according to claim 1 , further comprising:
a drain contact region formed over the surface of the semiconductor substrate and connected to the drain of the vertical transistor,
wherein one of the external drain terminals is formed over the drain contact region.
3. The semiconductor device according to claim 2 ,
wherein the active cell region and the drain contact region are opposed to each other at least along the three sides.
4. The semiconductor device according to claim 2 ,
wherein the active cell region has an area larger than that of the drain contact region.
5. The semiconductor device according to claim 4 ,
wherein an area ratio between the active cell region and the drain contact region is about 3:2.
6. The semiconductor device according to claim 1 ,
wherein the source electrode has an area larger than the drain electrode.
7. The semiconductor device according to claim 6 ,
wherein an area ratio between the source electrode and the drain electrode is about 3:2.
8. The semiconductor device according to claim 1 ,
wherein the external drain terminals and the external source terminals are arranged adjacent to each other.
9. The semiconductor device according to claim 8 ,
wherein one of the external drain terminals is disposed between a couple of the external source terminals.
10. The semiconductor device according to claim 1 ,
wherein a column including one of the external drain terminals and a column including one of the external source terminals are arranged alternately.
11. The semiconductor device according to claim 1 ,
wherein the drain electrode in which a plurality of the external drain terminals are formed is separated by the source electrode at the periphery of the external drain terminal.
12. The semiconductor device according to claim 1 ,
wherein the external gate terminal, the external drain terminal, and the external source terminal are arranged in this order in a first row over the surface of the semiconductor substrate, and
wherein the external source terminal, the external drain terminal, and the external source terminal are arranged in this order in a second row over the surface of the semiconductor substrate.
13. The semiconductor device according to claim 1 , further comprising:
a gate interconnect which is formed at least along the three sides in a region between the drain electrode and the source electrode and connected to the gate of the vertical transistor.
14. The semiconductor device according to claim 1 , further comprising:
an equi-potential ring electrode which is formed so as to surround an outer periphery of the semiconductor substrate and connected to the drain electrode.
15. A semiconductor device comprising:
an active cell region formed over a surface of a semiconductor substrate and including a vertical transistor;
an external gate terminal formed over the surface of the semiconductor substrate and electrically connected to a gate of the vertical transistor;
a drain electrode formed over the surface of the semiconductor substrate and leading out a drain of the vertical transistor from a back surface of the semiconductor substrate;
a plurality of external drain terminals formed over the drain electrode and electrically connected to the drain electrode;
a source electrode formed over the active cell region so as to be opposed to the drain electrode at least along three sides at a periphery of the external drain terminal and connected to a source of the vertical transistor;
a plurality of external source terminals formed over the source electrode and electrically connected to the source electrode; and
an equi-potential ring electrode which is formed so as to surround an outer periphery of the semiconductor substrate and connected to the drain electrode.