High-voltage vertical power component
View Patent ↗A vertical power component includes a silicon substrate of a first conductivity type with a well of the second conductivity type on a lower surface of the substrate. The first well is bordered at a component periphery with an insulating porous silicon ring. An upper surface of the porous silicon ring is only in contact with the substrate of the first conductivity type. The insulating porous silicon ring penetrates into the substrate down to a depth greater than a thickness of the well.
1. A vertical power component, comprising:
a silicon substrate doped with a first conductivity type and having an upper surface and a lower surface opposite said upper surface;
a first well in the lower surface of said silicon substrate doped with a second conductivity type;
a second well in the upper surface of said silicon substrate doped with the second conductivity type;
a first insulating porous silicon ring surrounding said first well and having a lower surface aligned with the lower surface of the silicon substrate, a depth which exceeds a thickness of the first well and an upper surface in contact with the first conductivity type silicon substrate, said first insulating porous silicon ring in contact with a junction between the first well and the silicon substrate; and
a second insulating porous silicon ring surrounding said second well and having an upper surface aligned with the upper surface of the silicon substrate, a depth which exceeds a thickness of the second well and a lower surface in contact with the first conductivity type silicon substrate, said second insulating porous silicon ring in contact with a junction between the second well and the silicon substrate; and
wherein the first and second porous silicon rings are not in contact with each other.
2. The component of claim 1 , further comprising:
a first electrode in contact with the first well on the lower surface of the silicon substrate; and
a second electrode in contact with the second well on the upper surface of the silicon substrate.
3. The component of claim 2 , further comprising: a gate electrode in contact with the second well on the upper surface of the silicon substrate, the gate electrode insulated from said second electrode.
4. The component of claim 3 , further comprising a heavily doped region of the first conductivity type in said second well which is in contact with said gate electrode.
5. The component of claim 2 , further comprising:
a first heavily doped region of the first conductivity type in said first well which is in contact with said first electrode; and
a second heavily doped region of the first conductivity type in said second well which is in contact with said second electrode.