Method for improving the reflectivity of aluminum in OLED structure
The present disclosure discloses a method for improving the reflectivity of aluminum in OLED structure. The OLED structure includes a top ITO layer, a middle reflective layer made by aluminum and a bottom ITO layer. The method comprises; forming a bottom ITO layer; coating the aluminous reflective layer on the surface of the bottom ITO layer and forming an aluminum oxide layer on the surface of the aluminous reflective layer uniformly by introducing plenty of oxygen gas simultaneously; adjusting the velocity of coating the aluminous reflective until the aluminum oxide layer is formed; and forming an top ITO layer on the surface of the aluminum oxide layer. The present disclosure can repair and cover the defects on the surface of the metal aluminum film and can reduce the concavities and hillocks on the surface of the metal aluminum film. Consequently, the reflectivity of aluminum in OLED structure is improved.
1. A method for improving the reflectivity of aluminum in OLED structure, comprising:
(a) forming a bottom ITO layer;
(b) coating an aluminous reflective layer on a surface of the bottom ITO layer and forming an aluminum oxide layer on a surface of the aluminous reflective layer uniformly by introducing oxygen gas simultaneously; and
(c) forming a top ITO layer on a surface of the aluminum oxide layer;
wherein, the aluminum oxide layer has a thickness ranging from 5 nm to 50 nm.
2. The method as claimed in claim 1 , wherein coating velocity and refractive index of the aluminum oxide layer of the aluminum oxide layer are adjusted by adjusting power, temperature and flow velocity of the oxygen gas simultaneously.
3. The method as claimed in claim 2 , wherein the coating velocity of the aluminum oxide layer ranges from 5 Å/s to 10 Å/s.
4. The method as claimed in claim 2 , wherein the refractive index of the aluminum oxide layer ranges from 1.7 to 1.8.
5. The method as claimed in claim 4 , wherein thickness of the aluminous reflective layer is 2000 Å.
6. The method as claimed in claim 1 , wherein the coating velocity and refractive index of the aluminum oxide layer are adjusted by adjusting power and temperature simultaneously.
7. The method as claimed in claim 6 , wherein the coating velocity of the aluminum oxide layer ranges from 5 Å/s to 10 Å/s.
8. The method as claimed in claim 6 , wherein the refractive index of the aluminum oxide layer ranges from 1.7 to 1.8.
9. The method as claimed in claim 8 , wherein thickness of the aluminous reflective layer is 2000 Å.
10. The method as claimed in claim 1 , wherein the coating velocity and refractive index of the aluminum oxide layer are adjusted by adjusting power and flow velocity of the oxygen gas simultaneously.
11. The method as claimed in claim 10 , wherein the coating velocity of the aluminum oxide layer ranges from 5 Å/s to 10Å/s.
12. The method as claimed in claim 10 , wherein the refractive index of the aluminum oxide layer ranges from 1.7 to 1.8.
13. The method as claimed in claim 12 , wherein thickness of the aluminous reflective layer is 2000 Å.
14. The method as claimed in Claim 1 , wherein the coating velocity and refractive index of the aluminum oxide layer are adjusted by adjusting temperature and flow velocity of the oxygen gas simultaneously.
15. The method as claimed in claim 14 , wherein the coating velocity of the aluminum oxide layer ranges from 5 Å/s to 10 Å/s.
16. The method as claimed in claim 14 , wherein the refractive index of the aluminum oxide layer ranges from 1.7 to 1.8.
17. The method as claimed in claim 16 , wherein thickness of the aluminous reflective layer is 2000 Å.
18. The method as claimed in claim 1 , wherein sputter coating is adopted in the process of coating.