IP Library Granted Patent US 9,488,570
Granted Patent B2
US 9,488,570 · App. 14/511,842 · Granted Nov 8, 2016

Systems and methods for pressure differential molecular spectroscopy of compressible fluids

Inventor: Vidi A. Saptari (Lexington, MA)
Assignees: Pason Systems Corp.; MKS Instruments, Inc.
G01N21/31G01N21/05G01N21/3504G01N21/359G01N21/3518G01N33/225G01N2021/3536G01N2201/023
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Quick Facts
Patent No.
US 9,488,570
App. No.
14/511,842
Granted
Nov 8, 2016
Kind
B2
Abstract

Described herein is a spectroscopic system and method for measuring and monitoring the chemical composition and/or impurity content of a sample or sample stream using absorption light spectroscopy. Specifically, in certain embodiments, this invention relates to the use of sample pressure variation to alter the magnitude of the absorption spectrum (e.g., wavelength-dependent signal) received for the sample, thereby obviating the need for a reference or ‘zero’ sample. Rather than use a reference or ‘zero’ sample, embodiments described herein obtain a spectrum/signal from a sample-containing cell at both a first pressure and a second (different) pressure.

Claims (12)

1. A spectroscopic system for measuring chemical composition and/or trace impurities in a compressible fluid sample, the system comprising:

an electromagnetic radiation source for generating electromagnetic radiation;

optics for directing the generated electromagnetic radiation through a sample cell containing a compressible fluid sample;

an optical detector array for receiving electromagnetic radiation from the sample cell containing the fluid sample and for generating an electrical signal indicative of spectral information associated with the fluid sample;

a pressure modulating system for varying the pressure of the fluid sample in the sample cell, thereby varying sample density; and

a processor and memory having instructions stored thereon, wherein the instructions, when executed by the processor, cause the processor to identify and/or analyze at least two absorption spectra obtained at different sample pressures in the fluid sample, thereby identifying a differential absorption spectrum for the fluid sample.

2. The spectroscopic system of claim 1 wherein the pressure modulating system comprises:

a valve assembly having a first input port, a second input port, and an output port, the valve assembly being configured to selectably permit flow (i) between the first input port and the output port and (ii) between the second input port and the output port, according to a selectable configuration of the valve assembly; and

a check valve connecting between the first input port and the second input port to allow setting of measurement pressure of the fluid sample in the sample cell.

3. The spectroscopic system of claim 2 , wherein the valve assembly comprises a three-way valve.

4. The spectroscopic system of claim 1 , wherein the sample cell is a flow cell permitting flow of the fluid sample therethrough during measurement.

5. The spectroscopic system of claim 1 , wherein the pressure modulating system allows for setting measurement pressure of the fluid sample in the sample cell at a first pressure and at a second pressure while maintaining a consistent flow rate throughout measurement.

Assignments (11)
RELEASE OF SECURITY INTEREST Recorded Aug 24, 2022
From: BARCLAYS BANK PLC
To: MKS INSTRUMENTS, INC.; NEWPORT CORPORATION; ELECTRO SCIENTIFIC INDUSTRIES, INC.
Reel/Frame 063009/0001 →
RELEASE OF SECURITY INTEREST Recorded Aug 24, 2022
From: BARCLAYS BANK PLC
To: MKS INSTRUMENTS, INC.; NEWPORT CORPORATION; ELECTRO SCIENTIFIC INDUSTRIES, INC.
Reel/Frame 062739/0001 →
SECURITY INTEREST Recorded Aug 19, 2022
From: MKS INSTRUMENTS, INC.; NEWPORT CORPORATION; ELECTRO SCIENTIFIC INDUSTRIES, INC.
To: JPMORGAN CHASE BANK, N.A., AS COLLATERAL AGENT
Reel/Frame 061572/0069 →
CORRECTIVE ASSIGNMENT TO CORRECT THE REMOVE U.S. PATENT NO.7,919,646 PREVIOUSLY RECORDED ON REEL 048211 FRAME 0312. ASSIGNOR(S) HEREBY CONFIRMS THE PATENT SECURITY AGREEMENT (ABL). Recorded Jan 14, 2021
From: ELECTRO SCIENTIFIC INDUSTRIES, INC.; MKS INSTRUMENTS, INC.; NEWPORT CORPORATION
To: BARCLAYS BANK PLC, AS COLLATERAL AGENT
Reel/Frame 055668/0687 →
RELEASE OF SECURITY INTEREST Recorded Feb 1, 2019
From: DEUTSCHE BANK AG NEW YORK BRANCH
To: MKS INSTRUMENTS, INC.; NEWPORT CORPORATION
Reel/Frame 048226/0095 →
PATENT SECURITY AGREEMENT (ABL) Recorded Feb 1, 2019
From: ELECTRO SCIENTIFIC INDUSTRIES, INC.; MKS INSTRUMENTS, INC.; NEWPORT CORPORATION
To: BARCLAYS BANK PLC, AS COLLATERAL AGENT
Reel/Frame 048211/0312 →
SECURITY AGREEMENT Recorded May 4, 2016
From: MKS INSTRUMENTS, INC.; NEWPORT CORPORATION
To: BARCLAYS BANK PLC; BARCLAYS BANK PLC
Reel/Frame 038663/0139 →
SECURITY AGREEMENT Recorded May 4, 2016
From: MKS INSTRUMENTS, INC.; NEWPORT CORPORATION
To: DEUTSCHE BANK AG NEW YORK BRANCH
Reel/Frame 038663/0265 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Aug 26, 2015
From: PRECISIVE, LLC
To: MKS INSTRUMENTS, INC.
Reel/Frame 036427/0297 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Mar 9, 2015
From: PRECISIVE, LLC
To: PASON SYSTEMS CORP.
Reel/Frame 035113/0820 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Mar 9, 2015
From: SAPTARI, VIDI A.
To: PRECISIVE, LLC
Reel/Frame 035113/0803 →
Continuity (2)
Provisional Application 61890119 · Oct 11, 2013
Related Publication 20150131093A1 · May 14, 2015