IP Library Granted Patent US 9,500,519
Granted Patent B2
US 9,500,519 · App. 14/095,516 · Granted Nov 22, 2016

Superconducting single photon detector

Inventors: Hongxing Tang (Orange, CT); Wolfram Pernice (New Haven, CT); Carsten Schuck (New Haven, CT)
Assignee: Yale University
G01J1/0425B82Y20/00G02B6/0229G02B6/12004G01J2001/442Y10S977/954
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Quick Facts
Patent No.
US 9,500,519
App. No.
14/095,516
Granted
Nov 22, 2016
Kind
B2
Abstract

The present invention provides a device and system for high-efficiency and low-noise detection of single photons within the visible and infrared spectrum. In certain embodiments, the device of the invention can be integrated within photonic circuits to provide on-chip photon detection. The device comprises a traveling wave design comprising a waveguide layer and a superconducting nanowire atop of the waveguide.

Claims (34)

1. A device for the detection of single photons in the visible and infrared spectrum, the device comprising a buried waveguide layer in a substrate and a superconducting nanowire, wherein the substrate comprises a cavity exposing at least a portion of the buried waveguide layer, and wherein the superconducting nanowire is positioned atop the exposed portion of the buried waveguide layer.

2. The device of claim 1 , wherein the waveguide layer is made of a material selected from the group of silicon nitride, aluminum nitride, gallium nitride, sapphire, diamond, silicon, gallium phosphide, silicon oxide, and magnesium oxide.

3. The device of claim 1 , wherein the superconducting nanowire comprises two longitudinal segments running along the length of the waveguide and wherein the longitudinal segments are attached to each other at one end by a curved region, thereby forming a U-shaped nanowire.

4. The device of claim 1 , wherein the nanowire has a thickness of about 0.5 nm to about 100 nm.

5. The device of claim 1 , wherein the length of the nanowire is about 1 μm to about 200 μm.

6. The device of claim 3 , wherein the width of at least one of the longitudinal segments is about 30 nm to about 100 nm.

7. The device of claim 1 , wherein the substrate is a wafer comprising an insulator layer.

8. The device of claim 1 , wherein the thickness of the waveguide layer is about 10 nm to about 5000 nm.

9. The device of claim 1 , wherein the width of the waveguide layer is about 10 nm to about 5000 nm.

10. The device of claim 1 , wherein the device comprises at least one grating coupler for coupling of an optical fiber to the device.

11. The device of claim 1 , wherein the nanowire is connected to an electrode.

12. The device of claim 1 , wherein the device is integrated within a photonic chip.

13. The device of claim 1 , wherein the superconducting nanowire is composed of a material selected from the group of NbN, NbTiN, MgB2, High Tc cubrates including YBCO, and iron based superconductors.

14. A device for the detection of single photons in the visible and infrared spectrum, the device comprising:

a substrate layer having a cavity;

a silicon nitride layer atop the substrate layer and cavity;

a superconductor nanowire atop the silicon nitride layer, wherein the nanowire is positioned above the cavity;

an insulator layer atop the superconducting nanowire; and

a reflector layer atop the insulator layer.

15. The device of claim 14 , wherein the superconducting nanowire is composed of a material selected from the group of NbN, NbTiN, MgB2, High Tc cubrates including YBCO, and iron based superconductors.

16. The device of claim 14 , wherein the cavity comprises a geometry such that an optical fiber self-aligns to the superconducting nanowire when inserted into the cavity such that light from the optical fiber passes through the silicon nitride layer and to the superconducting nanowire.

17. A system for the detection of single photons in the visible and infrared spectrum comprising:

at least one device for detecting a photon, the at least one device comprising a buried waveguide layer in a substrate and a superconducting nanowire, wherein the substrate comprises a cavity exposing at least a portion of the buried waveguide layer, and wherein the superconducting nanowire is positioned atop the exposed portion of the buried waveguide layer;

at least one optical fiber optically coupled to a waveguide of the at least one device; and

a tool for measuring the output of the superconducting nanowire of the at least one device.

18. The system of claim 17 , wherein the waveguide layer is made of a material selected from the group of silicon nitride, aluminum nitride, gallium nitride, sapphire, diamond, silicon, gallium phosphide, silicon oxide, and magnesium oxide.

19. The system of claim 17 , wherein the superconducting nanowire is made of a material selected from the group of NbN, NbTiN, MgB2, High Tc cubrates including YBCO, and iron based superconductors.

20. The system of claim 17 , wherein the superconducting nanowire comprises two longitudinal segments running along the length of the waveguide and wherein the longitudinal segments are attached to each other at one end by a curved region, thereby forming a U-shaped nanowire.

21. The system of claim 17 , wherein the nanowire is connected to an electrode.

22. The system of claim 17 , wherein the at least one device is integrated within a photonic chip.

23. The system of claim 17 , wherein the system comprises an external current source for delivering a bias current to the superconducting nanowire.

24. The system of claim 17 , wherein the system comprises an RF-probe for detecting the output of the nanowire.

25. The system of claim 17 , where the at least one device is housed within a cryostat.

26. A device for the detection of single photons in the visible and infrared spectrum, the device comprising a buried waveguide layer in a substrate, a superconducting nanowire, and a surface waveguide layer evanescently coupled to the buried waveguide layer, wherein the superconducting nanowire is positioned atop the surface waveguide layer.

Assignments (2)
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Oct 17, 2016
From: TANG, HONGXING; PERNICE, WOLFRAM; SCHUCK, CARSTEN
To: YALE UNIVERSITY
Reel/Frame 040034/0222 →
CONFIRMATORY LICENSE Recorded Feb 24, 2015
From: YALE UNIVERSITY
To: NATIONAL SCIENCE FOUNDATION
Reel/Frame 035090/0392 →
Continuity (2)
Provisional Application 61732500 · Dec 3, 2012
Related Publication 20140299751A1 · Oct 9, 2014