Color filter and manufacturing method thereof
A color filter pattern including a plurality of color filters arranged in a pattern and the manufacturing method thereof are provided. By performing at least one two-stage exposure process to a color filter layer, the plurality of color filters are formed with a sharp profile.
1. A method of forming a photoresist pattern, comprising:
forming a photoresist layer on a substrate;
performing a two-stage exposure process to the photoresist layer, wherein the two-stage exposure process comprises:
performing a first exposure process with a first light at a first wavelength to expose a portion of the photoresist layer; and
performing a second exposure process with a second light at a second wavelength to the exposed portion of the photoresist layer, wherein the first wavelength of the first light is shorter than the second wavelength of the second light; and
removing unexposed portions of the photoresist layer to form the photoresist pattern.
2. The method of claim 1 , wherein the first light of the first wavelength is a deep ultraviolet (DUV) light at 248 nm or at 193 nm.
3. The method of claim 2 , wherein the DUV light at 248 nm is provided by a KrF excimer laser, or the DUV light at 193 nm is provided by an ArF excimer laser.
4. The method of claim 1 , wherein the second light at the second wavelength is i-line light at 365 nm, h-line light at 405 nm or g-line light at 436 nm.
5. The method of claim 4 , wherein the second light at the second wavelength is provided by a mercury lamp or a UV lamp.
6. A method of forming a green color filter pattern, comprising:
forming a green color filter layer on a substrate;
performing a first two-stage exposure process to the green color filter layer, wherein the two-stage exposure process comprises:
performing a first exposure process with a first light at a first wavelength to expose a portion of the green color filter layer; and
performing a second exposure process with a second light at a second wavelength to the exposed portion of the green color filter layer, wherein the first wavelength of the first light is shorter than the second wavelength of the second light; and
removing unexposed portions of the green color filter layer to form the green color filter pattern.
7. The method of claim 6 , wherein the first light of the first wavelength is a deep ultraviolet (DUV) light at 248 nm or at 193 nm.
8. The method of claim 7 , wherein the DUV light at 248 nm is provided by a KrF excimer laser, or the DUV light at 193 nm is provided by an ArF excimer laser.
9. The method of claim 6 , wherein the second light at the second wavelength is i-line light at 365 nm, h-line light at 405 nm or g-line light at 436 nm.
10. The method of claim 9 , wherein the second light at the second wavelength is provided by a mercury lamp or a UV lamp.
11. The method of claim 6 , further comprising forming a blue color filter pattern after forming the green color filter pattern, wherein forming the blue color filter pattern comprises:
forming a blue color filter layer on the green color filter pattern;
performing a third exposure process with the second light at the second wavelength to the blue color filter layer; and
removing unexposed portions of the blue color filter layer to form the blue color filter pattern.
12. The method of claim 11 , wherein a resolution of the blue color filter layer is lower than a resolution of the green color filter layer.
13. The method of claim 11 , further comprising forming a red color filter pattern after forming the green color filter pattern, wherein forming the red color filter pattern comprises:
forming a red color filter layer on the green color filter pattern;
performing a four exposure process with the second light at the second wavelength to the red color filter layer; and
removing unexposed portions of the red color filter layer to form the red color filter pattern.
14. The method of claim 13 , wherein a resolution of the red color filter layer is lower than a resolution of the green color filter layer.
15. The method of claim 6 , further comprising forming a blue color filter pattern before forming the green color filter pattern, wherein forming the blue color filter pattern comprises:
forming a blue color filter layer on the substrate;
performing a second two-stage exposure process to the blue color filter layer, wherein the two-stage exposure process comprises:
performing a fifth exposure process with the first light at the first wavelength to expose a portion of the blue color filter layer; and
performed a sixth exposure process with the second light at the second wavelength to the exposed portion of the blue color filter layer, wherein the first wavelength of the first light is shorter than the second wavelength of the second light; and
removing unexposed portions of the blue color filter layer to form the blue color filter pattern.
16. The method of claim 15 , further comprising forming a red color filter pattern after forming the green color filter pattern, wherein forming the red color filter pattern comprises:
forming a red color filter layer on the green color filter pattern;
performing a seventh exposure process with the second light at the second wavelength to the red color filter layer; and
removing unexposed portions of the red color filter layer to form the red color filter pattern.
17. The method of claim 16 , wherein a resolution of the red color filter layer is lower than a resolution of the green color filter layer.