IP Library Granted Patent US 9,508,570
Granted Patent B2
US 9,508,570 · App. 14/058,396 · Granted Nov 29, 2016

Singulation apparatus and method

Inventors: Chi Wah Cheng (Ysing Yi, HK); Eric Lap Kei Chow (Kowloon, HK); Joseph Hoi Shuen Tang (Kwai Chung, HK); Chun Kit Liu (Tsuen Wan N.T., HK)
Assignee: ASM TECHNOLOGY SINGAPORE PTE LTD
H01L21/67092B28D5/024B28D5/029H01L21/68764
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Quick Facts
Patent No.
US 9,508,570
App. No.
14/058,396
Granted
Nov 29, 2016
Kind
B2
Abstract

A singulation apparatus and method including: at least one chuck station to which a workpiece is securable, the at least one chuck station being configured to move along a feed direction; a bridge extending above the at least one chuck station, the bridge having a first side and a second side opposite the first side; a first cutting device with members mounted to the bridge and being independently movable along the first side, transversely to the feed direction; and a second cutting device with members mounted to the bridge and being independently movable along the second side, transversely to the feed direction, the first and second cutting devices being configured and arranged for cutting the workpiece.

Claims (10)

1. A singulation apparatus, comprising:

at least one chuck station to which one or more workpieces are securable, the at least one chuck station being configured to move along a feed direction;

a bridge extending above the at least one chuck station, the bridge having a first side and a second side opposite the first side;

a first cutting device mounted to the bridge and being independently movable along the first side, transversely to the feed direction, wherein the first cutting device comprises a first cutting member and second cutting member movably mounted on the first side of the bridge; and

a second cutting device mounted to the bridge and being independently movable along the second side, transversely to the feed direction, wherein the second cutting device comprises a third cutting member and a fourth cutting member movably mounted on the second side of the bridge,

each of the first, second, third, and fourth cutting members being configured and arranged to be independently movable with respect to one another for cutting the one or more workpieces.

2. The singulation apparatus according to claim 1 , wherein the bridge comprises a first bridge member to which the first cutting device is mounted, and a second bridge member to which the second cutting device is mounted, the second bridge member being separated from the first bridge member.

3. The singulation apparatus according to claim 1 , wherein each of the first and second cutting devices comprises a plurality of cutting members.

4. The singulation apparatus according to claim 3 , wherein the plurality of cutting members of each of the first and second cutting devices are arranged in one or more pairs, wherein each pair of cutting members comprises blades, wherein the blades of the pair of cutting members or the blades of each pair of cutting members face each other to cut the workpiece along the feed direction.

5. The singulation apparatus according to claim 4 , wherein the total number of pairs of cutting members of the first and second cutting devices is equal to the number of chuck stations.

Assignments (2)
CHANGE OF NAME Recorded Jan 20, 2023
From: ASM TECHNOLOGY SINGAPORE PTE LTD
To: ASMPT SINGAPORE PTE. LTD.
Reel/Frame 062444/0830 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Jan 15, 2014
From: CHENG, CHI WAH; CHOW, LAP KEI ERIC; TANG, HOI SHUEN JOSEPH; LIU, CHUN KIT
To: ASM TECHNOLOGY SINGAPORE PTE LTD
Reel/Frame 031975/0973 →
Continuity (1)
Related Publication 20150111366A1 · Apr 23, 2015