Metal oxide film, method for manufacturing same, thin film transistor, display apparatus, image sensor, and X-ray sensor
Provided is a metal oxide film, including a component having a peak position, in an XPS spectrum thereof, within a range corresponding to a binding energy of from 402 eV to 405 eV, the metal oxide film satisfying a relationship represented by Equation (1): A/(A+B)≧0.39, when an intensity of peak energy attributed to nitrogen 1s electron is obtained by peak separation, and a manufacturing method of the same, an oxide semiconductor film, a thin-film transistor, a display apparatus, an image sensor, and an X-ray sensor. In Equation (1), A represents a peak area of the component having a peak position within a range corresponding to a binding energy of from 402 eV to 405 eV, and B represents a peak area of a component having a peak position within a range corresponding to a binding energy of from 406 eV to 408 eV.
1. A metal oxide film, comprising a component having a peak position, in an XPS spectrum of the metal oxide film, obtained by an X-ray photoelectron spectroscopy analysis, within a range corresponding to a binding energy of from 402 eV to 405 eV, the metal oxide film satisfying a relationship represented by the following Equation (1) when an intensity of a peak energy attributed to a nitrogen 1s electron is obtained by peak separation:
A/ ( A+B )≧0.39 Equation (1)
wherein, in Equation (1), A represents a peak area of the component having a peak position within a range corresponding to a binding energy of from 402 eV to 405 eV, and B represents a peak area of a component having a peak position within a range corresponding to a binding energy of from 406 eV to 408 eV.
2. The metal oxide film according to claim 1 , which satisfies a relationship represented by the following Equation (2) when the intensity of the peak energy attributed to a nitrogen 1s electron is obtained by peak separation in the XPS spectrum of the metal oxide film, obtained by an X-ray photoelectron spectroscopy analysis:
A/ ( A+B )≧0.73 Equation (2)
wherein, in Equation (2), A represents the peak area of the component having a peak position within a range corresponding to a binding energy of from 402 eV to 405 eV, and B represents the peak area of the component having a peak position within a range corresponding to a binding energy of from 406 eV to 408 eV.
3. The metal oxide film according to claim 1 , comprising indium.
4. The metal oxide film according to claim 3 , comprising:
indium; and
at least one selected from the group consisting of Zn, Sn, Ga and Al.
5. The metal oxide film according to claim 3 , wherein a content of indium is 50 atom % or higher with respect to a total content of metal elements included in the metal oxide film.
6. A conductive oxide film, comprising the metal oxide film according to claim 1 .
7. An oxide semiconductor film, comprising the metal oxide film according to claim 1 .
8. A thin-film transistor, comprising:
an active layer comprising the oxide semiconductor film according to claim 7 ;
a source electrode;
a drain electrode;
a gate insulating film; and
a gate electrode.
9. A display apparatus, comprising the thin-film transistor according to claim 8 .
10. An image sensor, comprising the thin-film transistor according to claim 8 .
11. An X-ray sensor, comprising the thin-film transistor according to claim 8 .