NOR structure flash memory and manufacturing method thereof
A NOR flash memory and its manufacturing method are provided in the present disclosure, they are in the field of flash memory. In the manufacturing method, a mask dielectric layer is formed on a second polysilicon layer of a gate stack structure. In addition, part of the mask dielectric layer is etched patternedly to expose part of the second polysilicon layer which is close to a source. Furthermore, the exposed second polysilicon layer is self aligned to form a metal silicide layer. Thus in the NOR flash memory, an unetched mask dielectric layer is substantially located between a metal silicide layer and a drain contacting hole of the NOR flash memory. A drain current between the gate electrode and the drain electrode is small, the above manufacturing method is not complex, a process window is large, a side effect is small, which are advantageous to large scale production.
1. A method of manufacturing a NOR flash memory having a substrate, comprising the following steps:
providing a gate stack structure configured to form the NOR flash memory, the gate stack structure comprising a tunneling dielectric layer, a first polysilicon layer, an inter-poly layer dielectric, a second polysilicon layer having a surface inclined at a non-zero angle relative to the first polysilicon layer, which are sequentially laminated from low to up;
forming a mask dielectric layer on the second polysilicon layer;
etching patternedly part of the mask dielectric layer to expose part of the second polysilicon layer which is close to a source of the NOR flash memory; and
self aligning the part of second polysilicon layer exposed during the etching to form a metal silicide layer;
wherein the entire top surface of the first polysilicon layer is horizontal relative to the substrate; and
wherein a portion of the top surface of the second polysilicon layer is inclined relative to the substrate.
2. The method according to claim 1 , wherein in the NOR flash memory, two symmetric flash memory units share a source to form a common source.
3. The method according to claim 2 , wherein part of the mask dielectric layer is etched when a corresponding dielectric layer on the common source of the NOR flash memory is etched.
4. The method according to claim 3 , wherein the thickness of the mask dielectric layer is in the range of from 30 nm to 100 nm.
5. The method according to claim 3 , wherein the etching is an anisotropic etching.
6. The method according to claim 3 , wherein the metal silicide is cobalt silicide or tungsten silicide.
7. The method according to claim 1 , wherein after the metal silicide layer is formed, the method further comprises:
forming a barrier layer of an interlayer dielectric;
forming an interlayer dielectric on the barrier layer;
flattening the interlayer dielectric; and
patterning to form a drain contacting hole leading out a drain electrode.
8. The method according to claim 1 , wherein the thickness of the mask dielectric layer is in the range of from 30 nm to 100 nm.
9. The method according to claim 1 , wherein the mask dielectric layer is made of silica.
10. The method according to claim 1 , wherein the etching is an anisotropic etching.
11. The method according to claim 1 , wherein the metal silicide is cobalt silicide or tungsten silicide.
12. The method according to claim 1 , wherein a 0.13 μm or less technology is used in the method.
13. A NOR flash memory manufactured according to the method of claim 1 , wherein the NOR flash memory comprises an unetched mask dielectric layer, the unetched mask dielectric layer is substantially located between a metal silicide layer and a drain contacting hole of the NOR flash memory.
14. The NOR flash memory according to claim 13 , wherein the thickness of the unetched mask dielectric layer is in the range of from 30 nm to 100 nm.
15. The NOR flash memory according to claim 13 , wherein a critical dimension of the NOR flash memory is 0.18 μm or less.
16. The method of claim 1 , wherein a portion of the top surface of the first polysilicon layer is horizontal, and a portion of the top surface of the second polysilicon layer directly above the first portion of the top surface of the first polysilicon layer is non-horizontal.