IP Library Granted Patent US 9,558,970
Granted Patent B2
US 9,558,970 · App. 12/992,970 · Granted Jan 31, 2017

Device and method for drying separated electronic components

Inventors: Jurgen Hendrikus Gerhardus Huisstede (Goor, NL); Wilhelmus Johannes In Den Bosch (Nijmegen, NL)
Assignee: Besi Netherlands B.V.
H01L21/67028F26B5/16H01L21/67034H01L21/67046H01L21/67092H01L21/67336H01L21/6838
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Quick Facts
Patent No.
US 9,558,970
App. No.
12/992,970
Granted
Jan 31, 2017
Kind
B2
Abstract

The invention relates to a device for at least partially drying separated electronic components comprising: a carrier for the electronic components; a moisture-absorbing material; and a holder covered with the moisture-absorbing material, wherein the holder and the carrier are displaceable relative to each other such that the electronic components for drying can be brought into contact with the moisture-absorbing material.

Claims (21)

1. A device for at least partially drying separated electronic components, comprising

a carrier for the electronic components;

a moisture-absorbing material; and

a holder holding the moisture-absorbing material;

wherein the holder is substantially flat with openings through which gas flow can be generated;

wherein the holder and the carrier are displaceable relative to each other such that the electronic components for drying can be brought into contact with the moisture-absorbing material, and each of the openings of the holder and the recesses of the carrier are in alignment with each other;

wherein the device is also provided with suction device for suctioning absorbed moisture out of the moisture-absorbing material;

wherein the carrier is provided with recesses for at least partially receiving the electronic components and a layer of moisture-absorbing material is received in the recesses;

wherein the moisture-absorbing material received in the recesses is selected from the group consisting of hydrophilic foams, including sponges made of polyvinyl alcohol and/or polyurethane; and

wherein the recesses are connected to an underpressure system that removes moisture and dirt from the moisture-absorbing material received in the recesses.

2. The device as claimed in claim 1 , wherein the moisture-absorbing material is provided with pores with a diameter of 100-200 micron.

3. A method for at least partially drying separated electronic components, comprising the processing steps of:

A) providing on a carrier a number of separated electronic components lying in one plane;

B) bringing the separated electronic components into contact with a moisture-absorbing material, wherein the moisture absorbing material is held in place by a holder that is substantially flat with openings through which gas flow can be generated; and

C) suctioning moisture present in the moisture-absorbing material out of the moisture-absorbing material using a suction device,

wherein the carrier also absorbs moisture by means of a flexible moisture-absorbing material disposed in recesses provided in the carrier, which recesses are connected to an underpressure system that removes moisture and dirt from the moisture-absorbing material received in the recesses,

wherein each of the openings of the holder and the recesses of the carrier are in alignment with each other.

4. The method as claimed in claim 3 , wherein the moisture is suctioned out of the moisture-absorbing material from a side proximate to the holder and opposite the side along which it has previously been absorbed by the moisture-absorbing material.

5. The method as claimed in claim 3 , wherein during the contact with the separated electronic components the moisture-absorbing material also removes dirt and/or dust particles from the electronic components as well as moisture.

6. The method as claimed in claim 3 , wherein the carrier also absorbs moisture by means of moisture-absorbing material connected to the carrier.

7. The device as claimed in claim 1 wherein the recesses are aligned in a matrix of at least two columns and two rows.

Assignments (2)
CHANGE OF NAME Recorded Sep 22, 2014
From: FICO B.V.
To: BESI NETHERLANDS B.V.
Reel/Frame 033783/0711 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Jan 26, 2011
From: HUISSTEDE, JURGEN H. G.; IN DEN BOSCH, WILHELMUS JOHANNES
To: FICO B.V.
Reel/Frame 025697/0713 →
Priority Claims (1)
NL 2001642 · May 30, 2008 · national
Continuity (1)
Related Publication 20110113645A1 · May 19, 2011